二手 STEAG / MATTSON / AST 2800 #9205415 待售

RTP System, 8" Configuration: Dual load lock single chamber RTP General configuration: 30L N2 High: 50psi / 2Bar / Tool, dynamic (Full N2 flow) 60psi / 2.8Bar / Tool, static (No N2 flow) 10L O2 High: 40psi / 2Bar / Tool, dynamic (Full O2 flow) 42psi / 2.5Bar / Tool, static (No O2 flow) O2 Low: 40psi / 2Bar / Tool, dynamic (Full O2 flow) 42psi / 2.5Bar / Tool, static (No O2 flow) 10L Ar: 40psi / 2Bar / Tool, dynamic (Full Ar flow) 43psi / 2.5Bar / Tool, static (No Ar flow) CDA: 90psi Tool: 5.5bar Chamber high cool: Bottom: 17/18 m³/h Top: 26/27 m³/h Chamber H20 cooling: 6.8LPM TC Amplifier test With Omega meter O2 Sensor final testing: 3ppm O2: 30L N2 Flow in chamber in 30 second 4-5ppm O2: 5L N2 Flow in chamber in 60 seconds Robot atation names: A: Primary sender I: Secondary receiver F: Furnace D: Cooling station 0 Cooling station 1 (No cooling station 1, used for dummy station) C: Dummy wafer station Pyrometer calibration: Un-calibrated pyrometer check: Pyro 878C output at 1080TC With emis 1300 Calibration recipe: TOMCAL.2 Calibration file: TRCAL0923 Network setup: Network ID / Machine name: 03AST Facility name: Serial gemSecs used Expansion board: COM8 AST 01 and 02 RTP: Physical dummy wafer station: No Cooling station: Dummy wafer station C Gas panel: TYLAN MFC's Robot: Equipe 307 No swivel cassette stations Install connections: 03AST Gasbox above rear of tool: Supplies MFCs N2 O2 H2 Mix Ar Connections at bottom rear tool: CDA: 1/4" Swagelok / 90- 120psi PCWS: 1/2" Swagelok / 8slpm PCWR: 1/2" Swagelok / 60 - 120PSI PCWS: 1/2" Swagelok PCWR: 1/2" Swagelok HiFlow N2: 1/2" Swagelok / >90PSI in operation Cooling N2: 1/4Inch Swagelok / 10 - 30 slpm Vent1: 3/8" Swagelok / Acid exhaust Vent2: 3/8" Swagelok / Acid exhaust 11/2" Exhaust / 11/2" / Tube acid exhaust Middle bottom of tool: Blower output / 4" Tube / Heat exhaust Front tool: House vacuum / 1/4" Swagelok / 600 mbar Power supply: 43KVA / 208VAC / 3 Phase / 125amps / 125 Max fusable.