二手 AMAT / APPLIED MATERIALS Centura 5200 #9061043 待售

Etcher, 8" Cassette nest plastic, 8" Wafer shape: SNNF (Semi notch no flat) System information: Platform type: Centura (3) Process chambers SECS / GEM: Yes Chamber location / Type / Current process: Position A / MxP / Poly etch Position B / MxP / Poly etch Position C / MxP / Poly etch Position F / Orienter (Laser assy not available) Etch chamber: Chamber type: MxP Wafer clamp: Polyimide ESC BS He cooling: Yes He dump line: Yes Turbo pump: SEIKO STP-301CVB Endpoint type: Stand alone Monochrometer: Per chamber Generator model: ENI OEM-12B3 Max power: 1250w Lid temp control: PID Control Gate valve: Heated gate valve Matcher: SMA-1000 Process manometer: MKS 1Torr Gas panel: Manual valve: Yes Transducer: Yes Transducer displays: Yes Regulator: Yes Filter: Yes Gas panel facilities hook up: Single line drop bottom feed (Left side) Exhaust: Top Gas panel door interlock: Yes Gas panel exhaust interlock: Yes Gas panel pallet: Corrosive gas line: (2) Lines per chamber Inert gas line: (6) Lines per chamber MFC type: STEC SEC-7440MC Gas line (gas name, MFC size) ChA Line 1: CL2 / 80 / SEC-7440 Line 2: HBR / 100 / SEC-7440 Line 3: NF3 / 100 / SEC-7440 Line 4: CHF3 / 70 / SEC-7440 Line 5: O2 / 40 / SEC-7440 Line 6: CF4 / 100 / SEC-7440 Line 7: Ar / 100 / SEC-7440 Line 8: N2 / 100 / SEC-7440 ChB Line 1: CL2 / 83 / SEC-7440 Line 2: HBR / 100 / SEC-7440 Line 3: NF3 / 100 / SEC-7440 Line 4: CHF3 / 70 / SEC-7440 Line 5: O2 / 40 / SEC-7440 Line 6: CF4 / 100 / SEC-7440 Line 7: Ar / 100 / SEC-7440 Line 8: N2 / 100 / SEC-7440 ChC: Line 1: CL2 / 80 / SEC-7440 Line 2: HBR / 100 / SEC-7440 Line 3: NF3 / 100 / SEC-7440 Line 4: CHF3 / 70 / SEC-7440 Line 5: O2 / 40 / SEC-7440 Line 6: CF4 / 100 / SEC-7440 Line 7: Ar / 100 / SEC-7440 Line 8: N2 / 100 / SEC-7440 Mainframe: Facilities type: Regulated Loadlock type: Wide body Loadlock auto-rotation: Yes Wafer mapping type: Fast Wafer mapping sensor: Yes Cassette present sensor: Yes Transfer chamber manual lid hoist: Yes Robot type: HP Emo button: Front side Water leak detector: Yes Signal tower (front): Green, yellow, red (2) System monitor displays / controller: Front, remote Remotes: System controller & AC rack EMO button: Yes Smoke detector: Yes Line frequency and voltage: 50/60Hz, 208VAC, 3ph Remote UPS interface: Yes Generator rack EMO button: Yes Smoke detector: Yes Water leak detector: Yes Heat exchanger type: For wall: RISSHI CS-400SW-2 (0 - 80°C) For cathode: RISSHI CS-400SW-2 (0 - 80°C) Pumps type: LL Chamber: EBARA A30W Transfer chamber: EBARA A30W Ch A: EBARA A30W Ch B: EBARA A30W Ch C: EBARA A30W Gas scrubber: EBARA GTE-3 1996 vintage.