二手 AMAT / APPLIED MATERIALS Centura 5200 #9071275 待售

Epi Reactor, 8" Application: Sige Bipolar/BICMOS Chamber type | Selected option: Chamber A: (RH) Reduced pressure EPI Chamber B: (RH) Reduced pressure EPI Chamber C: (RH) Reduced pressure EPI Chamber D: Empty Chamber E: Empty Chamber F: (CA) Single slot cooldown EMO Guard ring Chamber A/B/C: Thickness control options: Accusett 2 Recipe control software: No Third manometer: P/N 0220-35949, 200 Torr Gas line isolation: Yes Leak check port: None RGA port and valve: None Gas delivery options: ATM Capability in GP Only: No Gas panel type: Configurable Gas panel exhaust: Chamber B side MFC: P/N: 0221-18389, Unit 8561 MFC's Filter: Millipore Pump purge: Yes Chamber A/B/C Gas Option: SiHCl3: Not applicable SiH2Cl2: Yes SiH4: Yes GEH4: Yes Direct inject dopant: 2 Mixed dopant 1: Yes Mixed dopant 2: Yes Mainframe: Loadlock type: P/N: 0220-35948 Narrow body load locks with tilt-out WBLL Equalization: No Cassette platform type: Universal Common chamber options: Variable speed blower: Yes SW Monitor quartz pyrometer kit: 3 Lamps type: Ushio log life Susceptors: Tabbed susceptor Brands: Toshiba Lift pin type: Hollow silicon carbide Susceptor support shaft: NCP Susceptor support shaft Tips: Silicon carbide removable tips Exhaust inserts: Stainless steel Lower liners: Non-vented Pump isolation valve: No Exhaust deposit reduction: N/A Transfer chamber: Wafer sensing: On the fly cneterfinding Transfer chamber lid hoist: Yes Robot: HP + ENP Transfer chamber purge, 15 SLM: Yes Diagnostics and control: SECSTrace: Yes Vacuum pumps: Pump brand: Edwards Loadlock chamber pump: Edwards iQDP40 Transfer chamber pump: Edwards iQDP40 Proces chamber pump: Edwards iH1000 Monitors: (1) Through the wall and (1) Table mount Manual Set Tools and kits: Centura HT Temp profiling kit Upper dome centering ring kit HT Level 1 Consumable kit (2) Additional Level 1 consumable kit Additional Epi quartz and graphite spares: (2) Reduced pressure upper dome (2) Lower dome (4) Spare susceptors (4) Preheat rings Manually input spare: P/N: 3920-01120, 10-120 lb-in torque wrench 480 V with transformer, 60 Hz, 600 A Currently installed 2005 vintage.