二手 AMAT / APPLIED MATERIALS Centura AP eMax CT #9371704 待售

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AMAT / APPLIED MATERIALS
模型
Centura AP eMax CT
ID: 9371704
晶圓大小: 12"
Dielectric etcher, 12" Process: Cu Wafer type: Notch Carrier: FOUP (3) Load ports (4) Chambers TDK Corrosion resistant loader module Alcatel IPUP Does not include Hard Disk Drive (HDD) Facility plate: N2 Regulator Manual valve Pressure gauge Loadlock pressure monitor: Gauge convectron: 1MTORR-1000TORR 1 / 4FVCR DNET Transfer pressure monitor: Gauge convectron: 1MTORR-1000TORR 1 / 4FVCR DNET 5 SLM N2 MFC Signal towers: Kit 4 Lights Devicenet light tower Cable: Monitor cable, 15 feet / 50 feet Pump cable, 75 feet Monitors: Monitor 1: Flat panel with keyboard Monitor 2: Remote flat panel Chamber configuration: Process kits: Qt / Si Gas inject: 3.5 Anodized SGD Chamber O-Ring: Chamraz 513 ALCATEL / ADIXEN / PFEIFFER ATH 1600M Turbo pump RF Match: DAIHEN RF Generator: ENI GHW 50 EPD Windows: Quick remove released quartz CM Test port: 1/2 VCR and KF25 Dual RGA Port: RGA port Endpoint type: H.O.T Endpoint Endpoint wavelength 1: CO 484 NM Endpoint wavelength 2: CN 387 NM Cathode temperature monitor ESC Power supply: CT HV RF Feed: Direct CT Cathode Dry pump: EABARA-ESR80WN Wall chiller: SMC-H2010 Cathode chiller: SMC-INR 496-003D Coolant: HT110 ESC type: ESC, Assembly, 12" , Dual electrode, IA Liner: CT Liner Process gas box configuration: Chamber A: Gas name / MFC Type size NF3 / FC-PN980CR1BA-100 CH3F / FC-PN980CR1BA-50 CH2F2 / FC-PN980CR1BA-50 O2 2000 / FC-PN980CR1BA-2000 O2 50 / FC-PN980CR1BA-50 O2 20 / FC-PN980CR1BA-20 N2 / FC-PN980CR1BA-200 CHF3 / FC-PN980CR1BA-200 CF4 / FC-PN980CR1BA-200 AR 300 / FC-DN780C-BA-300 Chamber B: Gas name / MFC Type size C4F6 / FC-PN980CR1BA-150 C4F8 / FC-PN980CR1BA-50 CO / FC-PN980CR1BA-500 CH2F2 / FC-PN980CR1BA-50 O2 2000 / FC-PN980CR1BA-2000 O2 50 / FC-PN980CR1BA-50 N2 / FC-PN980CR1BA-200 CHF3 / FC-PN980CR1BA-200 CF4 / FC-DN780C-BA-200 AR 300 / FC-DN780C-BA-300 Chamber C: Gas name / MFC Type size C4F6 / FC-PN980CR1BA-150 CH2F2 / FC-PN980CR1BA-50 O2 2000 / FC-PN980CR1BA-2000 O2 50 / FC-PN980CR1BA-50 O2 20 / FC-PN980CR1BA-20 N2 / FC-PN980CR1BA-200 CHF3 / FC-PN980CR1BA-200 CF4 / FC-DN780C-BA-200 AR 200 / FC-PN980CR1BA-200 AR 1500 / FC-PN980CR1BA-1500 Chamber D: Gas name / MFC Type size C4F6 / FC-PN980CR1BA-150 CH2F2 / FC-PN980CR1BA-50 O2 2000 / FC-PN980CR1BA-2000 O2 50 / FC-PN980CR1BA-50 N2 / FC-PN980CR1BA-200 CHF3 / FC-PN980CR1BA-200 CF4 / FC-PN980CR1BA-200 AR 200 / FC-PN980CR1BA-200 AR 1500 / FC-PN980CR1BA-1500.
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AMAT/APPLIED MATERIALS Centura AP eMax CT是一種專為光敏處理而設計的反應器。這種超高速熱處理反應堆是一種先進的工具，旨在使用戶能夠受益於更快的蝕刻周期、精確的溫度控制和精確的熱測量。AMAT Centura AP eMax CT的自來水冷卻設備使化學蝕刻室內的熱擴散最小，從而對蝕刻過程中的晶圓溫度提供高精度控制。借助先進的閉環反饋控制系統,用戶能夠按照規定精確地保持均勻的溫度和過程持續時間。這樣可以確保晶片不會受到溫度的任何意外波動的影響,這些波動可能會對其加工的敏感材料造成熱損壞。APPLIED MATERIALS Centura AP eMax CT還配備了先進的脈沖準分子源,可減少有害氣體的排放,並最大限度地減少不良副產品的產生。此功能有助於確保蝕刻過程保持一致和可預測。該源還具有單向氣流和快速晶圓傳輸單元，以幫助最大限度地減少顆粒數量和減少與清潔有關的停機時間。Centura AP eMax CT除了具有先進的技術能力外，還設計滿足最高的安全標準。其強大的安全監測機器能夠持續監測蝕刻過程，並能夠檢測到危險泄漏的存在。這確保了反應堆能夠安全可靠地運行。AMAT/APPLIED MATERIALS Centura AP eMax CT是一種先進的蝕刻反應器，為用戶提供可靠、高精度的蝕刻循環控制。其強大的功能有助於最大限度地減少熱擴散和減少除氣和顆粒計數。其安全監控工具確保持續監控蝕刻，使用戶能夠利用可靠、安全、高效的光刻蝕刻解決方案。
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