二手 AMAT / APPLIED MATERIALS Centura DxZ #9046124 待售
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ID: 9046124
晶圓大小: 8"
優質的: 1996
(3) chamber CVD system, 8"
Specifications:
Platform type: Centura I Body
SBC Board: V452
Chamber Type:
Position A: DxZ Nitride
Position B: DxZ Nitride
Position C: DxZ Nitride
Position D: Blank
Position E: MULTI COOLDOWN
CH A: DxZ Chamber:
Baratron Guage: 10Torr / 1Torr
Match: AE 3155094-003A
Heater Lift: 0010-38426
RF Generator: RFG 2000-2V
EPD: 0500-01047
Heater Driver: 0190-09419
CH B: DxZ Chamber:
Baratron Guage: 10Torr / 1Torr
Match: AE 3155094-003A
Heater Lift: 0010-38426
RF Generator: RFG 2000-2V
EPD: 0500-01047
Heater Driver 0190-09419
CH C: DxZ Chamber:
Baratron Guage: 10Torr / 1Torr
Match: AE 3155094-003A
Heater Lift: 0010-38426
RF Generator: RFG 2000-2V
EPD:
Heater Driver: 0190-09419
CH E: Cooldown Chamber:
Type: Multi cooldown
Gas Delivery Options:
Component Selection: standard
Valve: Veriflo
Transducer: MKS
Regulator:
Filter:
Transducer Displays:
MFC Type: STEC 4400
Gas Panel: Pallet A:
Pallet
Gas Line Configuration:
Line 1: Gas NH3
MFC Size: 2 SLM
Line 2: Gas N2
MFC Size: 5 SLM
Line 3: Gas SiH4
MFC Size: 200 SCCM
Line 4: Gas NF3
MFC Size: 1 SLM
Line 5: Gas N2O
MFC Size: 1 SLM
Line 6: Gas CF4
MFC Size: 3 SLM
Line 7: Gas N20
MFC Size: 4V 239.7 SCCM / 2V 119.8SCCM
Line 8: Gas N2
MFC Size: 5 SLM
Line 9: Gas HE
MFC Size: 5SLM
Gas Panel: Pallet B:
Pallet:
Gas Line Configuration:
Line 1: Gas NH3
MFC Size: 2 SLM
Line 2: Gas N2
MFC Size: 5SLM
Line 3: Gas SiH4
MFC Size: 200 SCCM
Line 4: Gas NF3
MFC Size: 1 SLM
Line 5: Gas N2O
MFC Size: 1 SLM
Line 6: Gas CF4
MFC Size: 3 SLM
Line 7: Gas N20
MFC Size: 4V 239.7 SCCM / 2V 119.8SCCM
Line 8: Gas N2
MFC Size: 5 SLM
Line 9: Gas HE
MFC Size: 5SLM
Gas Panel: Pallet C:
Pallet:
Gas Line Configuration
Line 1: Gas NH3
MFC Size: 2 SLM
Line 2: Gas N2
MFC Size: 5SLM
Line 3: Gas SiH4
MFC Size: 200 SCCM
Line 4: Gas NF3
MFC Size: 1 SLM
Line 5: Gas N2O
MFC Size: 1 SLM
Line 6: Gas CF4
MFC Size: 3 SLM
Line 7: Gas N20
MFC Size: 4V 239.7 SCCM / 2V 119.8SCCM
Line 8: Gas N2
MFC Size: 5 SLM
Line 9: Gas HE
MFC Size: 5SLM
Transfer Chamber Options:
Transfer Ch Manual Lid Hoist: yes
Robot Type: Centura HP robot
Robot Blade Option: Ceramic Blade
Remotes:
Heat Exchanger: AMAT 0
1996 vintage.
AMAT/APPLIED MATERIALS Centura DxZ Reactor是一種單晶片化學氣相沈積（CVD）設備,旨在提供卓越的沈積質量和延長刀具使用壽命。該系統采用模塊化概念設計，允許用戶根據生產需求定制設備。它具有一個具有獨立驅動的定心和平移站的旋轉敏感器平臺，以確保晶片到晶片的均勻放置。它還有一個數字溫度控制機器，帶有一個獨立的敏感器加熱元件，能夠在整個晶圓上實現均勻的熱處理。該工具配備了通用多淋浴頭，以確保獨特薄膜的均勻沈積以及高通量。該工藝室采用高度真空密封的方式進行無汙染操作，並包括一個凈化資產，以進一步減少汙染。AMAT Centura DxZ還配備了用於控制和監測過程氣體的氣體面板模型，以確保薄膜始終以優越的質量沈積。此外,還包括一個自動剝離機構,用於在維修、維護和升級過程中快速、方便地卸下薄膜。APPLIED MATERIALS Centura DxZ Reactor具有強大的設計和可靠的性能,是CVD在半導體和MEMS器件制造中的理想選擇。
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