二手 AMAT / APPLIED MATERIALS Centura MxP+ #9257030 待售

System, 8" Wafer shape: SNNF Centura type: Centura 1 No SMIF interface Chamber B and C: MXP+ Chamber F: Orient Buffer robot type: HP Buffer robot blade: Metal MF Facilities: Bottom Smoke detector: Alarm AC Rack type: Phase 1 Controller rack type: Phase 1 Controller to AC rack: 60 Ft Pump interface cable: 50 Ft Load lock type: Wide body / Core tool Wafer detector: Alarm Wafer sensor EMO Monitor and EDP monitor: Wall mount Controller to mainframe: 60 Ft RF to Chamber coaxial: 50 Ft Chamber A, B and C: Chamber type: MxP+ IHC Type: MKS 1179 Lid type: Clamp Bias RF match Magnet driver Cathode type: Simply cathode Gate valve: VAT Gate ESC Type: Polymide Manometer type: 1 Torr Slit valve O-ring: Viton RF Generator bias: OEM-12B Endpoint system: Monochrometer Turbo pump: SEIKO SEIKI 301 Throttle valve: Butterfly No auto bias Gas configuration for chamber A, B and C: GAS 1 / CH2F2 / 100 SEC-4400MC GAS 2 / SF6 / 100 SEC-4400MC GAS 3 / N2 / 100 SEC-4400MC GAS 4 / O2 / 100 SEC-4400MC GAS 5 / CF4 / 150 SEC-4400MC GAS 6 / CHF3 / 200 SEC-4400MC GAS 7 / AR / 200 SEC-4400MC Gas delivery options: STEC MFC Filter: MOTT Transducer: Core tool Gas connection: Single line drop Gas line feed direction: Bottom Exhaust feed side: BD Side Transducer displays: Core tool Regulator: Core tool Valve: Core tool Gas line feed side: AC Side Exhaust: Top (2) Chillers: NESLAB HX150 Heat exchanger for cathode and wall W/RS-485 Interface Chiller hose size: 3/8 Quick Generator rack and chiller valve connection: Manifold Transformer: 208 / 400 A Line frequency: 60 Hz 1995 vintage.