二手 AMAT / APPLIED MATERIALS Centura MxP+ #9351620 待售

Poly etcher, 8" Wafer shape: SNNF (Notch) Type: Centura 1 P-2 No SMIF interface Chamber A, B, C and D: MxP+ Buff robot type: HP Loadlock: Wide body Metal buff robot blade Water detector: Alarm Wafer sensor: Standard Smoke detector: Alarm EMO AC Rack: Single phase Monitor and EDP monitor: Standalone Controller rack: Single phase Umbilical cables: Controller to mainframe: 25 ft Controller to AC rack: 25 ft RF to chamber coaxial: 50 ft Pump interface cable: 50 ft Chamber A: Chamber type: MxP+ ESC Type: Polymide IHC Type: MKS 640 Manometer type: 1 Torr Lid type: Clamp Slit valve O-ring: Viton Bias RF match: Standard OEM 12B RF Generator No autobias End point: Monochromator SEIKO SEIKI 301 Turbo pump Magnet driver Simply cathode Butterfly throttle valve VAT Gate valve Standard process kit Chamber B, C and D: Chamber type: MxP+ IHC Type: MKS640 Manometer type: 1 Torr Lid type: Clamp Slit valve O-ring: Viton Bias RF match: Standard OEM 12B RF Generator No autobias End point: Monochromator SEIKO SEIKI 301 Turbo pump Magnet driver Simply cathode Throttle valve: Butterfly VAT Gate valve Gases: Chamber A and B: Gas / Name / MFC Size / Make / Model Gas 1 / CL2 / 200 / STEC / SEC-4400MC Gas 2 / HBR / 200 / STEC / SEC-4400MC Gas 3 / N2 / 20 / STEC / SEC-4400MC Gas 4 / CF4 / 200 / STEC / SEC-4400MC Gas 5 / O2 / 10 / STEC / SEC-4400MC Gas 6 / O2 / 100 / STEC / SEC-4400MC Gas delivery: MFC Maker: STEC MKS Transducer display NIPPON SEISEN Mykrolis Filter Regulator: Veriflo MKS Transducer FUJIKIN Valve Gas connection: Multiline drop Chiller: Chiller valve connections: Manifold Generator rack valve connection: Manifold Chiller hose size: 3/8 Quick Valve connection: Wall: Chamber A, B and C Cathode: Chamber A, B and C Power supply: 208 V, 400 A, 60 Hz 1997 vintage.