ID: 293757843
晶圓大小: 8"
優質的: 1995
System, 8"
HT Platform
(2) Epitaxial / Polycide chambers (A, D)
Cool station
Gases: SiH4, SiH2CI2, TiCI4, GeH4, SiH3CH3, B2H6, PH3, HCI, CH4, H2
(4) EDWARDS Pumps:
XH-1220HTX
QDP80 / QMB250
QDP40
QDP / Roots
1995 vintage.
