二手 AMAT / APPLIED MATERIALS Centura Ultima TE #116326 待售

CVD-HDP system, 8" Wafer shape: SNNF SMIF: no Chamber A: Ultima TE Chamber B: Ultima STD Chamber E: MS cool Chamber F: orienter Load lock type: wide body Chamber A: Nozzle: Side 24 ALN Top baffle: 4 hole ALN Turbo pump: STP-XH 2603P Dual independent He Control: Standard 10/10 Torr Clean method: Top Mount RPS AE ESC: without WTM Chamber B: Nozzle: Side 24 ALN Top baffle: 1 hole ALN Turbo pump: ET1600WS Dual independent He Control: Standard 10/10 Torr Clean method: microwave ESC: without WTM Electrical: Line frequency: 50/60Hz Line voltage: 200/208V Line amperage: 320A Facility UPS interface: yes GFCI: 100MA System monitor: 1st: TTW 2nd: stand alone 3rd: yes Mainframe: System placement: TTW Robot type: extended HP robot Robot blade: ceramic Load lock wafer mapping: enhanced Load lock slippage sensor: yes N2 purge type: STEC 4400M Generator rack: ETO 80-S09-uW ENI AM200 Ch. A: Top / side / bias Ch. B: Top / side / bias (2) Heat exchangers: 1: SMC 2: AMAT 1 Umbilicals: 55ft Dry pumps: Chamber A: under cleaning Chamber B: under cleaning Load lock Transfer Gas delivery option: VALVES: FUJIKIN 5 Ra max. Filters: Pall Transducers: MKS with display Regulators: VeriFlo Single line drop (SLD): yes SLD gas lines feed: top System cabinet exhaust: top Gas pane configuration: Chamber A: O2 500sccm UNIT 8161 AR 300sccm HORIBAR SiH4 200sccm STEC 7400 H2 1slm STEC 7400 HE 400sccm STEC 7400 SiH4 50sccm STEC 7400 H2 1slm STEC 7400 HE 400sccm STEC 7400 AR 1slm STEC 7400 NF3 2lm UNIT 8161 Chamber 4: O2 400sccm STEC 7440 AR 300sccm STEC 7440 SiH4 200sccm HORIBAR 50%PH3/SiH4 200sccm STEC 7440 AR 50sccm STEC 7440 SiH4 20sccm STEC 7440 50%PH3/SiH4 20sccm STEC 7440 NF3 2slm HORIBAR AR 2slm STEC 7440 O2 not shown 1998 vintage.