二手 AMAT / APPLIED MATERIALS Centura Ultima X #9107256 待售

CVD System, 12" Wafer Shape JMF Position A ULTIMA X HDP-CVD Position B ULTIMA X HDP-CVD Position C ULTIMA X HDP-CVD Position D NA       Position A Process OXIDE - USG / STI Position B Process OXIDE - USG / STI Position C Process OXIDE - USG / STI Position D Process NA Line Voltage 208 VAC Line Amperage PRIMARY 320A, SECONDARY 240A (A) ULTIMA X HDP-CVD Ultima X Chamber Options Selected Option Integrated Process Module IPM : YES Turbo Pump TMP-3203LMC-A1 Nozzle Type Gas Ring 36 PORT Top Baffle Upper Chamber ENHANCED Process Application USG / STI Process Kit STANDARD Clean Method NPP RPS (NEW POWER PLASMA) Independent Helium Cooling ENABLED (B) - (Z7) ULTIMA X HDP-CVD Ultima X Chamber Options Selected Option Integrated Process Module IPM : YES Turbo Pump TMP-3203LMC-A1 Nozzle Type Gas Ring 36 PORT Top Baffle Upper Chamber ENHANCED Process Application USG / STI Process Kit STANDARD Clean Method NPP RPS (NEW POWER PLASMA) Independent Helium Cooling ENABLED (C) - (Z7) ULTIMA X HDP-CVD Ultima X Chamber Options Selected Option Integrated Process Module IPM : YES Turbo Pump TMP-H3603LMC-A1 Nozzle Type Gas Ring 36 PORT Top Baffle Upper Chamber ENHANCED Process Application USG / STI Process Kit STANDARD Clean Method NPP RPS (NEW POWER PLASMA) Independent Helium Cooling ENABLED Gas Delivery Options Gas Panel Selected Option Gas Feed BOTTOM Gas Panel Exhaust BOTTOM MFC Type UNIT 8565 & 8565C Gas Panel Door STANDARD Valves VERIFLO Display Gas Pallets Gas Lines Transducers NONE Regulators NONE Filters Millipore/Mykrolis/NAS Clean A - (Z7) ULTIMA X HDP-CVD PALLET Selected Option Gas Pallet Line 1 Upper N2 PURGE Line 1 Lower O2 - 1L Line 2 H2 (MFC Missing) Line 3 HE - 600SCCM Line 4 SiH4 - 400SCCM Line 5 AR - 1L Line 6 HE - 600SCCM Line 7 H2 - 1L Line 8 SiH4 - 50SCCM Line 9 AR - 50SCCM Line 10 NF3 - 400SCCM Line 11 NF3 - 15SLM Line 12 Ar - 3L Line 13 Lower Line 13 Upper N2 PURGE Plasma Detect YES B - (Z7) ULTIMA X HDP-CVD PALLET Gas Pallet Line 1 Upper N2 PURGE Line 1 Lower O2 - 1L Line 2 H2 (MFC Missing) Line 3 HE - 600SCCM Line 4 SiH4 - 400SCCM Line 5 AR - 1L Line 6 HE - 600SCCM Line 7 H2 (MFC Missing) Line 8 SiH4 - 50SCCM Line 9 AR - 50SCCM Line 10 NF3 - 400SCCM Line 11 NF3 - 15SLM Line 12 Ar - 10SLM Line 13 Lower Line 13 Upper N2 PURGE Plasma Detect YES C - (Z7) ULTIMA X HDP-CVD PALLET Gas Pallet Line 1 Upper N2 PURGE Line 1 Lower O2 - 400SCCM Line 2 NF3 - 400SCCM Line 3 H2 - 1L Line 4 SiH4 - 400SCCM Line 5 HE - 600SCCM Line 6 AR - 50SCCM Line 7 H2 - 1L Line 8 SiH4 - 50SCCM Line 9 HE - 600SCCM Line 10 NF3 - 400SCCM Line 11 NF3 - 15SLM Line 12 Ar - 3L Line 13 Lower Line 13 Upper N2 PURGE Plasma Detect YES Mainframe Options Process Chamber Isolation CHAMBER A SLIT VALVE CHAMBER B SLIT VALVE CHAMBER C SLIT VALVE Mainframe and FI Alignment MF AND FI ALIGNMENT FIXTURES CFW Manifold YES LL and Xfer Ch Vac and Vent Mainframe Type AP MAINFRAME SWLL Doors AP STD SWLL DOOR SWLL Cooldown Wafer Hoop Type WAFER HOOP Transfer Chamber Robot Blades Transfer Chamber Robots STD REACH DUAL BLADE ROBOT Transfer Chamber Lid CLEAR LID Factory Interface Options WIP Delivery Type OHT WIP DELIVERY Number of Load Ports 2 LOAD PORTS Atmospheric Robots KAWASAKI 2 FIXED ROBOTS WITH EDGE GRIP(C61D-B001) Load Port Types ENHANCED 25 WAFER FOUP E84 Carrier Handoff UPPER E84 INTERFACE ENABLED OHT OHT Light Curtain LIGHT CURTAIN Operator Access Switch YES Configurable Colored Lights YES Light Towers Air Intake Systems Remote Options Sytem Monitors Selected Option Monitor 1 FLAT PANEL WITH KEYBOARD ON STAND Monitor 2 Heat Exchanger Selected Option Heat Exchanger Type NA Umbilicals Selected Option Heat Exchanger Hose Length Pumps Selected Option Pump Supplied By NA Pump Interface Type NA AC Racks Selected Option Facilities UPS Interface YES Chamber Generator Type ENI GENERATOR RACK SMC HX H2O Connection NA QIL HX Qty Ch A RF Generator Type ENI GENERATOR RACK (SPECTRUM B-10513) Ch B RF Generator Type ENI GENERATOR RACK (SPECTRUM 11002-00) Ch C RF Generator Type ENI GENERATOR RACK (SPECTRUM 11002-00) Heat Exchanger Cable Length Pump Interface Cable Length Monitor 1 Cables Monitor 2 Cables Missing Parts Turbo Throttle Valve Ch#B Gas Panel DIO Board HDD Currently warehoused 2003 vintage.