二手 AMAT / APPLIED MATERIALS Endura 5500 SIP EnCoRe #158915 待售

System, 8" Number of Chambers: 5 Process capabilities: Hot Al, SIP TTN, SiP Encore Cu, SIP Encore Ta(N) and CleanW Application: Copper Barrier Seed Wafer size range: 6" to 8" Wafer set size: 8" Chamber 1: Enhanced Hot Aluminum Standard Body Chamber Mech Clamped chuck, Ti clamp ring CTI Onboard Cryo, fast regen, low vibe Magnet type: 12.9" Al A,P/N: 0020-26822 Chamber 2: Ti Nitride Wide Body Chamber Elec. Chuck: Bias MCS ESC, SST cover ring Wafer bias power supply, 13.56MHz 600 W, CTI Onboard Cryo, fast regen, low vibe Magnet type: SIP REV2, P/N: 0010-04065 Chamber 3: SIP Encore Cu Wide Body Chamber Elec. Chuck: SLT FDR E-Chuck, Ti cover ring, cryo chilled Wafer bias power supply, 13.56MHz 1250 W, CTI Onboard Cryo, fast regen, low vibe Magnet type: LP 8.8, P/N: 0010-12864 Chamber 4: SIP Encore Ta(N) Wide Body Chamber Elec.Chuck: SLT FDR E-Chuck, Ti -Arc-Sp Wafer bias power supply, 13.56MHz 600W, ICE RF Match CTI Onboard Cryo, fast regen, low vibe Magnet Type: Encore Rev 2, P/N:0010-14875 Chamber 5: CleanW PVD Wide Body Chamber Elec. Chuck: MCS+ ESC, SST-Arc-Sp cover ring CTI Onboard Cryo, fast regen, low vibe Magnet type: PVD WII, P/N: 0010-11925 Interface Type: SECS RS-232 Elevator Type: Universal Manual with Rotate External Cooling: Water Cooled Accessories: (3) CTI 9600 Compressor, p/n: 3620-01389, water cooled (3) CTI Onboard Terminal, p/n: 3620-01553 (2) Neslab System III Heat Exchanger (1) CTL Inc subzero chiller, Model: BCU-L310F1-AMAT (1) Toyota T100L Dry Pump (2) Toyata T600 Dry Pump Other Information: Buffer Chamber Position "A": Pass thru with clear plastic lid Position "B": Cooldown with temp monitor Position "D": Reactive Preclean, Leybold TMP Position "E" Orienter degas with temp feedback Position "F" Orienter degas with temp feedback Wide Body Loadlocks with variable speed soft vent VHP Transfer Robot with HTHU compatible blade HP+ Buffer Robot with with original metal blade 50' Cable harness SMIF Integrated Tool Control #NB: Asyst SMIF Loader sold as option. Power Requirements: 480 V, 500.0 A, 60 Hz, 3 Phase CE Marked: yes 2007 vintage.