二手 AMAT / APPLIED MATERIALS Endura 5500 #9030866 待售
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ID: 9030866
PVD system, 8"
System software ver: C8.622
System Platform: Endura
Wafer Shape: SNNF
EMO Type: Turn to Release
CE Safety Mark: English
CIM Configuration: SECS
SBC Version: V452
Mainframe Configuration:
Buffer Robot Type: HP
Buffer Robot Blade: Thin Metal
XFER Robot Type: VHP
XFER Robot Blade: Original Metal
Lid Hoist: Yes
Status Light Tower: RYG
Remote Monitor: Table Mount
Sub-System Configuration:
(1) Chiller: Model: None
Cryo Pump Type: CTI Cryo- on board 8F
Cryo Pump Power: 3 Phase
(2) CompressorS
Compressor Type: 9600
Loadlock Configuration:
Loadlock Type: Narrow body
Auto Rotation: Yes
Cassette Type: 8"
Mapping Function: WFM
Vent Type: Variable Speed
Fast Vent Option: Yes
LLKs NB w/Auto Tilt
A Pass-thru
B Cool Down
E O/D (Std)
F O/D (Std)
C PCII w/Cryo Std
D PVD TiN 101
1 PVD Tungsten (W) HT-ESC - Chamber has UV Flash for ESC E-Clean
2 PVD Hot-Al HT-ESC - Source Assy missing, Process kit still intact.
3 PVD Hot-Al HT-ESC - Source Assy missing, Process kit still intact
4 PVD Al/Cu SLT-ESC Complete
5 Iso-Valve (Manual) -
Bfr HP
Txfr VHP (Style Lid)
PVD Hot-Al Chambers: These are Water-Cooled Chamber bodies (can't use for other processes which use Wide-Body Chambers
Gas Information:
Gas Box Pneumatic Valve: Single
Pneumatic Valve Type: Veriflo
Manual Valve Type: Veriflo
MFC Type: FC-780C
Gas Line Out: Out The Back
Modules:
M/F Yes
Sys/AC Yes
EQ1 Yes
EQ2 Yes
Main/AC Yes
AC Dist Box Yes
Cryo Comp 3 - 9600
Heat Ex Yes, Neslab III
Pumps No Pumps included with any tools
Lift Hoist non-AMAT, Gantry & 250lb hoist
Umbilical Configuration:
Controller to Main AC: 50 Feet
Controller to Mainframe: 50 Feet
Mainframe to Generator: 50 Feet
Remote Monitor: 50 Feet
Mainframe to Compressor: 50 Feet
Main AC to pump: 50 Feet
AC Box to Heat Exchanger: 50 Feet
Controller to Gen Rack: 50 Feet
Gen Rack to Gen Rack#2: 50 Feet
Electrical Configuration:
Line Voltage: 200V
Full Load Current: 487A
Remote Transformer: No
Frequency: 60Hz
Missing Parts:
Chamber E: Orientor PCB
Chamber F: Orientor PCB
Chamber 2: Missing upper chamber lid
Chamber 3: Missing upper chamber lid
Chamber C: Missing upper chamber lid
1995 vintage.
AMAT/APPLIED MATERIALS/AKT Endura 5500是一個單一晶圓加工反應器,具有先進的功能,適用於廣泛的半導體加工應用。這種直觀設計的反應堆旨在最大限度地提高生產率和工藝靈活性,使用戶能夠執行具有卓越工藝能力的非平面、平面和復雜的設備結構。AKT Endura 5500配備了由其先進的三區供暖制冷技術提供動力的無與倫比的熱能力,使用戶能夠準確控制溫度,在整個晶圓面上均勻反應。這種熱性能進一步配備了均勻流動介質註入技術,提供了對工藝氣體的精確控制和均勻分布。因此,用戶能夠以可重復和一致的性能實現最佳影片配置文件。反應堆的其他功能包括高可用性、減少停機時間和出色的過程控制。在安全和環境保護方面,AMAT ENDURA 5500符合UL/CSA等安全標準,具有像密封外殼這樣的特點,以保護人員不受危險工藝材料的潛在影響。此外,反應堆還配備了先進的診斷工具,便於進行有效的監測以及額外的工藝驗證。與傳統的熱過程相比,反應堆還提供了改進的過程均勻性和擴展的過程窗口,從而提高了靈活性和吞吐量。除了卓越的散熱性能外,APPLIED MATERIALS ENDURA 5500還為用戶提供靈活的控制選項,並提供可編程的進紙/通風口選項和支持高效現場過程控制的高級I/O配置。此外,反應堆利用化學安全殼和低流量模式,以實現高效運行和優化產量。利用它的精密運動控制器,用戶能夠實現小的,但精確的運動控制與快速校準,並集成到第三方系統也是可用的。綜上所述,AMAT/APPLIED MATERIALS/AKT ENDURA 5500是一個功能強大、用戶友好且安全的反應堆,可最大限度地減少浪費和總體成本。它提供節能技術、卓越的散熱性能、縮短的停機時間和出色的工藝控制,使其成為半導體行業的最佳選擇。
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