二手 AMAT / APPLIED MATERIALS P5000 MxP+ #185395 待售

Oxide etch system, 8" (2) Chambers Software Revision SBC Board Version V21 Mainframe cables Standard / Extended (length) STD Chamber Location A / B / C / D: A/B Safety Module EMO Switch(2): Present UPS & Power Vaccine Remote Frame Pump Control Interface: Present Circuit Breaker: Present EMO Switch: Present Expanded VME Monitor Rack CRT Monitor: Absent Light Pen: Absent Service Monitor Rack: Absent Miscellaneous Harddisk: Present Floppy Disk: Present Transformer: Present Gas Panel standard / Extended: Expanded Laminar Flow Hood Mainframe cover: Absent Loadlock Chamber Robot Type Phase III Robot: Phase III Type Robot Blade: 8 Inch Blade WPS: Installed TC Gauge: Installed ATM Switch: Installed Vacuum Switch: Installed Blade Chuck Vent Kit: Absent Vacuum Sensor(TC): Installed Storage Elv. Slots 8 or 29: 29 Wafer IO Sensor Present or Not: OK Electronics (BD) System Electronics TC guage boards(2): Installed +12 Vdc powersupply: Installed +15 Vdc powersupply: Installed -15 Vdc powersupply: Installed Buffer I/O board: Installed AI Mux board(1): Installed Optical sensor boards(*2ea): Installed Chopper driver boards (*4ea): Installed Pneumatic Control PCB: Installed Main DC Power Supply: Installed ESC Controller Board: Installed Chamber A CVD: OXIDE Chamber Type: MXP+ RF Match Box 0100-30686 Nv Module cesc: Yes Epd controller: Yes Gate valve: Yes Cap manometer 1: Mks 1Torr TC Gauge: Yes Isolation V/V: STD Throttle V/V Type: STD Slit V/V: STD Turbo pump: SEIKOSEIKI STP301CVB Turbo pump Controller: YES Chamber B: CVD: OXIDE Chamber Type: MXP+ RF Match Box 0100-30686 Nv Module cesc: Yes Epd controller: Yes Gate valve: Yes Cap manometer 1: Mks 1Torr TC Gauge: Yes Isolation V/V: STD Throttle V/V Type: STD Slit V/V: STD Endpoint module: Monocromator Turbo pump: SEIKOSEIKI STP301CVB Turbo pump Controller: YES Gas Interface PCB: Gas Panel Interface/Expanded Gas Panel PCB Solenoide V/V Module: STD/Expanded Air V/V: FUJIKIN Gas box A,B MFC UNIT - 8160: CHF3 100SCCM MFC UNIT - 8160: AR 200SCCM MFC UNIT - 8160: CF 50SCCM MFC UNIT - 8160: O2 10SCCM MFC UNIT - 8160: N2 100SCCM.