二手 AMAT / APPLIED MATERIALS P5000 MxP #9017018 待售
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ID: 9017018
Cluster tool, 8"
(2) Chambers
(8) Storage units
General Information:
Cass nest: Plastic 8"
Wafer shape: SNNF (Semi notch no flat)
No SMIF Interface
System Information:
Software version: B4.70
Has SECS / GEM
Chamber Location / Type / Current Process:
Position A: MxP / Oxide etch
Position B: MxP / Oxide etch
Etch chamber:
Chamber type: MxP
Wafer clamp: Polyimide ESC
Has BS He Cooling
Has He dump line
Turbo pump: SEIKO STP-301CVB
Endpoint type: Stand alone
Monochrometer qty: Each per chamber
Generator model: ENI OEM-12B3
Max Power: 1250 w
Lid temp control: PID control
Gate valve: Heated gate valve
Matcher: SMA-1000
Process Manometer: MKS 1 Torr
Gas Panel:
Manual valve: On each line
Filter: On each line
Gas panel facilities hook up: Multi-line top feed
Exhaust: Top
Has gas panel door interlock
Has gas panel exhaust interlock
Gas Panel Pallet:
(5) Insert gas lines per chamber
MFC Type: STEC SEC-44000 MC / STEC SEC-Z512MGX
Chamber A:
Line 1: O2 / 212 / SEC-4400
Line 2: Ar / 150 / SEC-Z512MGX
Line 3: N2 / 100 / SEC-4400
Line 4: CF4 / 100 / SEC-4400
Line 5: CHF3 / 100 / SEC-Z512MGX
Chamber B:
Line 1: O2 / 212 / SEC-4400
Line 2: Ar / 150 / SEC-Z512MGX
Line 3: N2 / 100 / SEC-7440M
Line 4: CF4 / 100 / SEC-4400
Line 5: CHF3 / 100 / SEC-Z512MGX
Mainframe:
Loadlock type: 8-slot
Has cassette present sensor
Robot type: DRIVE, ROBOT P 5000 WKIT
EMO Button: Front, side
Has water leak detector
Signal tower (front): Green, yellow, red
Remotes:
Line frequency and voltage: 50 / 60 Hz, 3 Ph, 208 VAC
Remote UPS interface: 1 Ph, 120 V
System monitor display / conntroller: In front
Has EMO button
Has smoke detector
Has water leak detector
Heat Exchanger type:
For wall: AMAT-0 x1
For cathode: NESLABE HX-150 x1
Pumps Type:
LL Chamber: EBARA A10S (not included in scope)
Chamber A: EBARA A30W (not included in scope)
Chamber B: EBARA A30W (not included in scope)
1992 vintage.
AMAT/APPLIED MATERIALS P5000 MxP是一種反應器,設計用於開始完成半導體器件的制造.該工具是一種高度通用的外延沈積工具,允許薄膜在高基質溫度下沈積。該工具能夠使用具有專有多區域技術的多個源進行沈積,從而提高均勻性,從而提高晶圓產量。先進的光源技術減少了功率和溫度的波動,確保了更好的膠片質量和可重復性。該工具具有卓越的靈活性,允許用戶沈積各種材料,包括氧化物、氮化物、金屬及其組合。此外,該工具允許一系列薄膜厚度,從亞單層到幾百納米。能夠操縱溫度、壓力流量和功率等參數,使用戶能夠量身定制沈積過程。AMAT P5000 MxP配備了專有的超高真空設備,可減少系統中的顆粒和汙染物並提高生產率。先進的視線沈積工藝通過創建一個完全密封的腔室並對其中的激光器作出反應,提供了比傳統沈積系統更好的質量。這有助於提高控制、穩定性和可重復性。該工具還具有先進的流程控制軟件,允許用戶優化流程以提高速度和效率。APPLIED MATERIALS P5000 MxP還具有強大的單元監控和診斷功能,有助於提高可靠性和預測性能。利用先進的監測功能,該工具可以檢測沈積參數、大氣壓或任何其他異常條件可能產生的問題,使操作員能夠迅速解決這些問題。總體而言,P5000 MxP是一種可靠、高性能的沈積工具,可讓用戶滿足半導體器件制造的嚴格要求。此工具提供了卓越的靈活性、改進的質量和可靠性、提高的產量以及先進的過程控制。AMAT/APPLIED MATERIALS P5000 MxP憑借其先進的多區技術和超高真空機,是半導體器件制造的理想選擇。
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