二手 AMAT / APPLIED MATERIALS P5000 MxP #9037741 待售
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ID: 9037741
Cluster tools with 2-chamber, 8"
General Information:
Cass nest: Plastic 8"
Wafer shape: SNNF (Semi notch no flat)
No SMIF Interface
System Information:
Software version: B4.70
Has SECS / GEM
Chamber Location / Type / Current Process:
Position A: MarkII / Oxide etch
Position B: MarkII / Oxide etch
Etch chamber:
Chamber type: MxP
Wafer clamp: Polyimide ESC
Has BS He Cooling
Has He dump line
Turbo pump: SEIKO STP-301CVB
Endpoint type: Stand alone
Monochrometer qty: Each per chamber
Generator model: CH-A:ENI OEM-12A CH-B:ENI OEM-12B-02
Max Power: 1250 w
Lid temp control: PID control
Gate valve: Heated gate valve
Matcher: SMA-1000
Process Manometer: MKS 1 Torr
Gas Panel:
Manual valve: On each line
Filter: On each line
Gas panel facilities hook up: Multi-line top feed
Exhaust: Top
Has gas panel door interlock
Has gas panel exhaust interlock
Has gas panel remote mini-controller
Gas Panel Pallet:
MFC type: 8-lines per chamber
Gas line (gas name, MFC size): STEC SEC-4400MC / STEC SEC-Z512MGX
Chamber A:
Line 1: CHF3/100/SEC-4400
Line 2: O2/40/SEC-4400
Line 3: CH2F2/30/SEC-4400
Line 4: CF4/100/SEC-4400
Line 5: NF3/100/SEC-Z512MGX
Line 6: HBr/200/SEC-4400
Line 7 (remote): CI2/50/40/SEC-4400
Line 8 (remote): Ar/100/40/SEC-4400
Chamber B:
Line 1: CHF3/100/SEC-4400
Line 2: O2/40/SEC-4400
Line 3: CH2F2/30/SEC-4400
Line 4: CF4/100/SEC-4400
Line 5: NF3/100/SEC-Z512MGX
Line 6: HBr/200/SEC-4400
Line 7 (remote): CI2/50/40/SEC-4400
Line 8 (remote): Ar/100/40/SEC-4400
Mainframe:
Loadlock type: 29-slot
Has cassette present sensor
Robot type: DRIVE, ROBOT P 5000 WKIT
EMO Button: Front, side
Has water leak button
Signal tower (front): Green, yellow, red
Remotes:
Line frequency and voltage: 50 / 60 Hz, 3 Ph, 208 VAC
Remote UPS interface: 1 Ph, 120 V
System monitor display / conntroller: In front
Has EMO button
Has smoke detector
Has water leak detector
Heat Exchanger type:
For wall: AMAT-0 x1
For cathode: NESLAB HX-150 x1
Pumps Type:
LL Chamber: EBARA A10S (not included in scope)
Chamber A: EBARA A30W (not included in scope)
Chamber B: EBARA A30W (not included in scope)
1993 vintage.
AMAT/APPLIED MATERIALS P5000 MxP Reactorm是一種成本效益高、體積大的工藝技術開發工具。該反應堆能夠高效、低成本地生產各種先進材料，包括陶瓷和金屬。反應堆的核心特征是其模塊化設計，使其能夠針對不同的應用和過程進行定制。AMAT P5000 MxP反應器旨在為用戶提供最佳的溫度、壓力和成分控制水平,同時還允許材料的反應靈活性。反應堆能夠處理高達500 °C的溫度和高達5 bar的壓力。它具有用於氣體進出口的頂部和底部端口，並具有特殊的曝氣系統，以改善空氣流通。反應堆還設有可調加熱區，便於精確控制溫度和反應參數。APPLICED MATERIALS P5000 MxP反應堆的模塊化設計允許輕松添加硬件和軟件,從而實現最佳的工藝路由。該反應堆可與各種傳感器、泵和其他部件集成在一起，以便進行有效的批量生產。此外，反應堆還設計了若幹控制和監測系統，包括計算機控制反應、自動數據收集和分析。為了使P5000 MxP反應堆的性能最大化，反應堆經常與電化學電池、氣相沈積室和等離子體蝕刻單元等二次處理器耦合。反應堆還擁有大量的材料模板庫，能夠快速切換所需的最終產品。這在與化學氣相沈積、濺射和反應性離子蝕刻等工藝技術結合使用時特別有利。總體而言，AMAT/APPLIED MATERIALS P5000 MxP反應堆是先進材料開發和制造的可靠和經濟高效的工具。反應堆的模塊化設計和多種多樣的功能使用戶能夠調整和擴展其特定應用的系統,其特點包括精確的溫度和成分控制,從而實現更好的過程控制、改進的產品質量和更大的多功能性。
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