二手 AMAT / APPLIED MATERIALS P5000 #9383379 待售

CVD System SNNF, 8" Wafer shape: 25-Slot SNNF Main frame: Loadlock: Standard Buffer chamber robot: Standard Process chamber (PECVD): Position A, B and C Cassette stage: Position: A and B Clamp on cassette 25-Slots Storage elevator: Center find 4-Slots Buffer chamber: Buffer type: Standard Load lock : Slow and fast Vent type: Venting and diffuser Load lock pumping type: Fast load lock pumping Slit valve: Bonded Wafer detector: Blade cap and vac sensor Gas / Pressure: Gas feed: Top Filters: MILLIPORE / PALL Pneumatic valves: Nupro / Veriflow Chamber pressure gauge: MKS 10 Torr Chamber foreline TC gauge: VARIAN Gas for chamber A: Gas / MFC SiH4 / 500 sccm N2 / 100 sccm N2O-H / 3000 sccm NF3 / 20 sccm N2O / 300 sccm Cl2 / 100 sccm Gas for chamber B: Gas / MFC SiH4 / 500 sccm N2 / 100 sccm N2O-H / 3000 sccm NF3 / 20 sccm N2O / 300 sccm Cl2 / 100 sccm Gas for chamber C: Gas / MFC O2 / 00 sccm CF4 / 20 sccm Ar / 100 sccm RF Generator and heat exchanger: ENI OEM-12B RF Generator: Chamber A and B ENI OEM-6 RF Generator: Chamber D RF match type: Phase-VI (2) RF Cable: 50ft CVD Heat exchanger type: AMAT-1 Heat exchanger signal cable: 32ft System local monitor: CRT with light pen Remote control cables (Analog, digital): (2) 50 FT Etchers Lift assembly Susceptor lift assembly Transfer robot Slit valve cylinder Wafer lift bellows Susceptor lift bellows Robot blade, 8" Throttle valve (Dual spring type) Belts in throttle valves DC Power cable: 50ft EMO Cable: 50ft Hard disk in VME Missing Power supply: 208 V, 50/60 Hz, 250 A / 5-Wires.