二手 AMAT / APPLIED MATERIALS Producer GT #9233074 待售

CVD System, 12" Control system: Device net protocol EFEM Communication: SFEM Wafer sliding detection sensors: LCF Signal tower: Common SPEC Door interlock sensor Pressure difference interlock: LL->TM->Chamber Slit valve: L-Motion No viton o-ring Air regulator EYE Mark display on M/C: LP1, LP2 Chamber A / B / C Gas box Turbo pump RPC RF Generator Match Electric valve & Load lock & Tm installed TM Blade: ALN No o-ring in chamber region No gate valve o-ring & Air regulator Missing / Detaching parts: (6) HARP AIN Heaters P/N: 0010-59796 Q-Code Q400-168177 FI. RT, FE Computer Practical preventing system in EFEM: 0.065µm Filter / Venting air Process: HARP, BPSG, ARC, P-TEOS Blue electrostatic chuck: Low temp 300° C Turbo screen location: Below chamber Heat exchanger: SUS Connector & Power vaccine Upgrade list pin mechanism: Dual lock list pin RF Reflect filter system / BIAS: Auto match Heat exchanger coolant: ZT180 Chamber lift speed: Stepping motor ESC Water leak RF Generator reflect power: Below set point 0.5% Input / Output port stage: OHT FOUP Capability: (25) Slots System monitor: LCD Remote monitor: Keyboard, LCD Gas line: 5- RA surface mounted c-seal Gas configuration: C3H6, O2, NF3 Gas line polishing: E/P 5-RA Filter: SUS316 SS/NF3 Hastelloy Gas box temperature: Display by digital gauge Negative voltage MFC signal: Display interlock Chamber pump: SAMSUNG Load lock & TM Pump Tempered type: Capacitance manometer for chamber pressure control Pressure transducer for chamber: ATM Switch TM & Load lock fore line shut-off valve: Electric valve General power & UPS Power: AC Rack design change for VDP Ground for D-net: Chassis Circuit safeguard: Circuit breakers Internal utility line color: SEMI Standard Head exchanger: Pressure control 2007 vintage.