二手 AMAT / APPLIED MATERIALS Producer GT #9265758 待售

CVD System, 12" EFEM Transfer module AC Rack NPP Rack WIP Delivery type: OHT Pre-alignment and centering: Single axis aligner Wafer pass thru and storage: 7 Slots wafer pass thru KAWASAKI 3NS510B Atmospheric robots (4) Load ports E84 Sensors and cables OMRON With RF Light curtain Carrier ID host interface Light towers UPS Interface Chamber process: HARP USG Process chamber type: Chamber A, B and C Twin: HT-ACL Local center finder Robot blade and type: FX Dual deck ceramic Chamber A, B and C: Frequency: Single APEX 3000 RF Generator Heater: HA12 Dual zone heater Single source with RF cap Manometer: 10 / 100 Torr / 70 Trip Clean type (RPS): Single (NPR804L) No NDTR endpoint No DPA Foreline, 2" ISO: MKS 99D0654 TV: MKS 683B-26033 Monitors: Stand alone TTW With keyboard Gas delivery - APF GP: MFC: UNIT 125 GF 125 No regulated gas panel Gas feed: Bottom Gas panel cabinet exhaust: Bottom exhaust No interlock indicator No transducers No display gas pallet No liquid source Gas pallet configuration: Chamber A: Gas / Size / Model AR / 4000 / Unit 125 O2 / 15000 / Unit 125 C3H6 / 3000 / GF 125 HE / 5000 / Unit 125 N2 / 10000 / Unit 125 C3H6 / 3000 / Unit 125 O2 / 10000 / Unit 125 AR / 10000 / Unit 125 NF3 / 5000 / Unit 125 Chamber B and C: Gas / Size / Model AR / 4000 / Unit 125 O2 / 15000 / Unit 125 C3H6 / 3000 / Unit 125 HE / 5000 / Unit 125 N2 / 10000 / Unit 125 C3H6 / 3000 / Unit 125 O2 / 10000 / Unit 125 AR / 10000 / Unit 125 NF3 / 5000 / Unit 125 Missing parts: A1 RF Signal cable L/L EUROTHERM controller (2) PIRANI Gauges Chamber C: (2) Heaters (2) L/L Lift LM guides Upper L/L foreline (3) Chamber AC box kits Mainframe box Driver box kit Power supply: 208 V, 50/60 Hz 2006 vintage.