二手 AMAT / APPLIED MATERIALS Producer S #9013303 待售
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ID: 9013303
晶圓大小: 8"
TEOS PECVD system, 8"
System Overview:
Technology DCVD
Platform Type PRODUCER SE
Wafer Size 200MM (8 INCH)
Wafer Shape SNNF
Position A (XY) PE TEOS TWIN
Position B (XY) PE TEOS TWIN
Position C (XY) PE TEOS TWIN
Position A Process (09) TEOS
Position B Process TEOS
Position C Process TEOS
System Software:
System software Latest qualified version V3.4_12
GP Latest qualified version P 133
Factory Interface System 5.4 FI, Options:
Number of Loadports Number of Loadports 2
Metrology Unit Nano Nanometrics
Light Towers 4 COLOR CONFIGURABLE LIGHT TOWER YES
MainFrame Options:
Rear MF Light Tower RAGB No NO
Remote Options, System Monitors:
First Local Monitor STAND ALONE, 15 Inch
Second Local Monitor TTW WITH KEYBOARD, 15 inch
Remote Options, Heat Exchanger:
System Heat Exchanger Qty ONE Steelhead 1
AMAT HX Hoses and Manifolds NO YES
Pumps:
Transfer chamber Customer supply, MUST meet GT SSPS Specifications!
Chamber A Roughing pump Customer supply, MUST meet GT SSPS Specifications!
Chamber B Roughing pump Customer supply, MUST meet GT SSPS Specifications!
Chamber C Roughing pump Customer supply, MUST meet GT SSPS Specifications!
Customer Fab Options:
System Power Mainframe 208V 300A 208V 3 Phase, 4 Wire 300A
Customer EMO Interface 24V AC
ChA-B-C, (XY) PE TEOS TWIN:
(2) Robot Blades Aluminum
RF Generator 1
RF Generator 2
(2) Heater HA-12 TIGHT RF MESH WITH CLAMP TYPE 2
(2) Rf Filter Rev ? RF filter
Foreline TV 2 1/2-inch heated throttle valve
Foreline ISO 2 1/2-inch heated ISO valve
RPS Astron EX RPS
ChA, (XY) PE TEOS TWIN, Gas Box Options:
Gas Pallet Type TEOS ONLY
ChA-B-C, (XY) PE TEOS TWIN, Gas Box Configuration, Gas Section:
Line 1 Empty
Line 2 Empty
Line 3 O2- 5SLM
Line 4 N2 Purge
Line 5 Ar- 5SLM
Line 6 NF3- 3SLM
Line 7 Empty
Line 8 Empty
Line 9 He- 5SLM
Line 10 Liquid Purge
Line 11 Empty
Line 12 Empty
Line 13 Empty
Line 14 Liquid Pos 1 TEOS- 4.0 g/min
ChA, (XY) PE TEOS TWIN, Process Abatement:
Abatement TCS
ChA, (XY) PE TEOS TWIN, Process Kit, TEOS:
(2) Gas Box Gas Box - Bypass 0040-53927
(2) Blocker UHD Blocker,200mm Producer 0021-09914
(2) Faceplate,TEOS Faceplate,200mm Producer 0021-01813
2000 vintage.
AMAT/APPLIED MATERIALS Producer S是一種以效能和性能聞名的先進反應堆。用於在基材上沈積多種材料，制造各種產品。它通常用作PECVD（等離子增強化學氣相沈積）反應器，是半導體工業中使用最廣泛的工具之一。AMAT PRODUCERS利用獨特的設計將等離子體均勻地分配到沈積室中，從而產生高質量和均勻的塗層。利用先進的湍流設備，產生最佳的工藝均勻性和可重復性。該設計確保每個生產步驟都針對微型元件和集成電路設備的生產進行了優化。該系統配備了各種先進的功能，以最大限度地提高效率，減少完成一個周期所需的時間。這包括一個雙腔室設計，它可以在所需的過程之間自動切換，從而使反應堆運行更快，中斷更少。此外,自動快門裝置有助於保持整個機器的統一工藝條件.APPLIED MATERIALS PRODUCER-S的設計精度和無與倫比的精度。它為用戶提供驗證和確認最佳工藝條件所需的工具。這是通過各種可以實時監控的診斷來實現的。所有相關參數都可以在整個生產過程中進行監控，允許操作員在過程出現問題時快速介入。反應堆也被設計成易於維護。其先進的功能保證了它的壽命和性能。除了這些創新功能外，該工具還提供多種安全功能，為其操作員提供安心。一旦遵循了所有安全準則,用戶就可以利用資產的強大設計,並確保他們能夠運行多個進程而不會出現任何問題。PRODUCer-S是一個非常先進和可靠的反應堆，提供無與倫比的多功能性和性能。APPLIED MATERIALS Producer S憑借其高效的設計和先進的特點，是任何希望以絕對精確的精度生產高品質產品的人的絕佳選擇。
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