二手 AMAT / APPLIED MATERIALS Producer SE #9017194 待售
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ID: 9017194
優質的: 2001
SACVD BPSG system, 8"
System overview:
Technology: DCVD
Wafer shape: SNNF
Position A: (XY) BPSG TWIN
Position B: (XY) BPSG TWIN
Position C: (XY) BPSG TWIN
System software: 3.4_8
NT version: P 133
Factory interface system 5.4 FI, options:
Number of load ports: 2
Metrology unit: Nanometrics
Light tower: 4-color configurable light tower
Remote options, system monitors:
First local monitor: standalone 15"
Second local monitor: TTW with keyboard, 15"
Remote options, heat exchanger:
System heat exchanger: Steelhead
AMAT HX hoses and manifolds: AMAT stainless hose upgrade: yes
Pumps:
Transfer chamber: BOC Edwards IPX-100L
Chamber A roughing pump: BOC Edwards iH-1000
Chamber B roughing pump: BOC Edwards iH-1000
Chamber C roughing pump: BOC Edwards iH-1000
System power mainframe: 208 V, 3 phase, 4 wire, 300 A
EMO interface: 24 VAC
Ch A-B-C, (XY) BPSG TWIN:
Robot blades: aluminum, (2) 0040-43516
Heater: HA-12 tight RF mesh with non RF cap, (2) 0190-03516
Foreline TV: 2.5" heated throttle valve, 0010-38429
Foreline ISO: valve, ISO 200 mm SACVD PROD-REP.16 holes, 0010-01653
RPS: Astron EX RPS, 0920-00057
Ch A, (XY) BPSG TWIN, gas box options:
Gas pallet type: BPSG only
Line 1: O3
Line 2: O2- 20SLM
Line 3: N2 Purge
Line 4: NF3- 3SLM
Line 5: Empty
Line 6: Ar- 5SLM
Line 7: He- 20SLM
Line 8: He- 20SLM
Line 9: He- 20SLM
Line 10: Liquid N2 purge
Line 11: Empty
Line 12: Empty
Line 13: Empty
Line 14: Liquid Pos 1, Teb- .5 g/min
Line 15: Liquid Pos 2, TEOS- 4.0 g/min
Line 16: Liquid Pos 3, Tepo- .25 g/min
Ch A-B-C, (XY) BPSG TWIN, process abatement: TCS
Ch A-B-C, (XY) BPSG TWIN, process kit:
Gas box: gas box - bypass, (2) 0040-53927
Blocker UHD: blocker, 200 mm producer, (2) 0021-09914
Faceplate BPSG: faceplate, 200 mm producer, (2) 0021-03568
Top pumping liner: pumping liner top producer, (2) 0020-00402
Liner, ceramic middle: liner, ceramic middle, producer, (2) 0020-00316
Liner, ceramic bottom: liner, ceramic bottom, producer, (2) 0020-00317
Liner, ring insert: liner, ring insert, producer, (2) 0021-06569
Lift pin-TC: lift pin 170 fixed floating 200 mm producer, (8) 0200-03314
Lift ring: lift ring 120 fixed floating 200 mm producer, (2) 0200-02576
Hoop: hoop 140 fixed floating 200 mm producer, (2) 0200-02577
2001 vintage.
AMAT/APPLIED MATERIALS Producer SE是一種高度先進的反應堆，設計用於生產先進材料和新型裝置。該反應堆的設計滿足了最嚴格的要求，為生產先進材料和新型裝置提供了盡可能高的產量。AMAT Producer SE匯集了可定制的半導體技術、材料科學和加工專業知識的獨特組合,為先進材料和設備提供了最高的產量。它專為實現最高級別的自動化和可擴展性而設計,以確保過程的保真度,無論客戶的數量或復雜性如何。這種反應堆的靈活結構允許精確控制反應物的流動，並且能夠處理各種各樣的反應物。該反應堆還具有先進的控制系統，確保可重復和可預測的反應和結果。控制系統能夠調整反應參數以微調過程和結果以優化收率。反應堆的先進設計包括一整套工藝室，每個室都配有加熱、冷卻和壓力控制系統。這允許精確控制反應溫度、反應時間和壓力剖面。此外，高速氣體輸送是可能的。該反應堆的材料處理系統還包括一套材料分析系統，如SEM/EDS、TEM、FTIR、GCMS和XRD。這些系統允許在加工之前和之後快速對材料部分進行表征。這意味著可以快速采樣和分析材料以進行精確的工藝優化。APPLIED MATERIALS Producer SE的設計旨在滿足先進材料和設備制造商的需求,從而實現高容量、高產產量和提高生產率。是將實驗室技術和實驗轉化為生產線的理想解決方案。
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