二手 AMAT / APPLIED MATERIALS Producer SE #9182254 待售

CVD System, 12" (2) Chambers Customer fab options: Electrical requirements: Line frequency: 60Hz Line voltage: 200/208 VAC Platform Chambers: Chamber A and B: Chamber process: XJ (PE Silane twin) RF1 Generator: APEX 3000 Gas delivery: Gas pallet type: Surface mount vertical Regulated gas panel: No Regulated TMS: No Gas feed: Top Gas panel cabinet exhaust: Top Facilities interlock indicator: No Facilities / Scrubber interface output: Fault Transducers: Setra Filters: Nippon Manual valves: Hamlet Pneumatic valves: Hamlet Liquid source: No Gas pallet configuration supplement: Chamber A: Gas line stick position / Process gas / MFC Size / Regulator (Yes, No) / Transducer (Yes, No) #1 / C3H6 / 3000sccm / No / No #3 / NF3 / 1000sccm / No / No #8 / 02 / 30000sccm / No / No #9 / AR / 15000sccm / No / No #10 / HE / 5000sccm / No / No #11 / O2 / 15000sccm / - / - #12 / AR CLN / 10000sccm / No / No #13 / N2 CLN / 15000sccm / No / No Liquid 1 / P-N2 / - / No / Yes Liquid 2 / P-N2 / - / No / Yes Chamber B: Gas line stick position / Process gas / MFC Size / Regulator (Yes, No) / Transducer (Yes, No) #1 / C3H6 / 3000sccm / No / No #3 / NF3 / 1000sccm / No / No #8 / O2 / 30000sccm / No / No #9 / AR / 15000sccm / No / No #10 / HE / 5000sccm / No / No #11 / O2 / 15000sccm / - / - #12 / AR CLN / 10000sccm / No / No #13 / N2 CLN / 15000sccm / No / No #17 / P-N2 / - / No / Yes #18 / P-N2 / - / No / Yes Mainframe: Local center finder: Yes Cu Wafer sensor: No MF Ch Harness installed: A & B Third MF IO motion card Robot blade: Standard VHP Factory interface options: 300mm Factory interface 5.3 options: WIP Delivery type: OHT Pre alignment and centering: Single axis aligner Wafer pass thru & storage: 8 Slot wafer pass thru Atmospheric robots: KAWASAKI 2 fixed robots with edge grip Remote control system cabable: Yes Docked E99 reading capability: No Load port types: Enhanced 25 wafer FOUP Load port operator interface: Standard 9 light Configurable color lights: No Docking flange shield: No Air intake system: Front facing intake plenum E84 Pl/O Sensors and cables: Upper E84 sensors and cables OHT Light curtain: Light curtain Carrier ID host interface: Yes Light towers: (3) Colors configurable Fast data gateway software: No Heat exchanger / Chiller: Heat exchanger AMAT HX hose and manifolds: No Remote AC: Facilities UPS interface Chamber configuration: Ch A / Ch B: BFC 2" Foreline T/V Type: 683B RF Filter: (0090-05813) RPS FFU Controller 2006 vintage.