二手 AMAT / APPLIED MATERIALS Smartweb SL-3L/800 #293745938 待售

Roll to roll coating system (2) Chillers Roughing pump system Process and rewinding module Media supply Electrical cabinet Cooling Heating Trolley Cathode colling Control PC Console table Scrubber Coatings: Materials / Mode Metals: Copper, Gold, Silver, Aluminium, Molybdenum, Titanium / DC Alloys: Ni/Cr 80/20 / DC Dielectrics: ITO, AI:ZnO / DC SiOx, AI2O3, TiO2 /MF ZnO / DC, MF System cooling water: Inlet pressure: 4 to 6 bar Outlet pressure: Pressure-less, Open drain Consumption: Maximum 50 m³/h Average consumption: Approximate 26 m³/h Temperature (Inlet): Minimum 18°C, Maximum 22°C Temperature rise: Maximum 6°C Carbonate hardness: <6 to 8° pH value: 8.5 to 10 particle size: Maximum 100 μm Particle concentration: Maximum 10 parts/cm³ CO2-content: Maximum 15 mg/l CI-content: Maximum 20 mg/l Cathode cooling circuit: Filling quantity: Approximate 1100 Liters Carbonate hardness: <7° pH value: 8.0 to 9 Particle size: <5 µm Solved oxygen: Maximum 5 mg/l Resistivity at + 25°C: >2 x 103 Ohm cm Compressed air: Pressure: 6 to 7 bar Average consumption: Approximate 1 m³/h Particle size: Maximum 5 µm Particle concentration: Maximum 5 mg/m³ Oil-content: Maximum 5 mg/m³ Dew point: 2°C Gases: Argon, Nitrogen, Oxygen, Argon/Oxygen 80/20 Pressure: 1, 2 bar Purity: 99.995 Gas tubing: Stainless steel, Coupling Winding: Web speed: 0.5 to 20.0 m/min + 0.1% of nominal speed at the motor shaft Unwind / Rewind: 60 to 600 N Tension measuring rollers with analog load cell Vacuum: Ultimate pressure: <8 x 10^-7 mbar in sputtering compartments of process modules Pump down time to ultimate pressure: 24 Hours Pressure during sputtering: 1 to 9 x 10^-3 mbar Pump down time to 6 x 10^-6 mbar: <60 minutes Measured at a pressure: < 2x10^-3 mbar Gas separation factor between sputter compartments and sputtering compartments: >100: 1, only for maximum substrate thickness loaded Electrical Services: Voltage: 400 V +10/-10% 50 Hz, 3 Phase, TN-network with loadable PEN for 60 Hz Connected load: 320 kVA Average consumption: Approximate 240 kW Short circuit current: Maximum 50 kA Process coating: Magnetron sputtering coating technology One coated side Substrate width: Maximum 820 mm Coating area web width reduced: 10 mm Coating width: Minimum: 300 mm, Maximum: 600 mm Environment: Temperature: Minimum 15°C, Maximum 35°C Humidity: Maximum 90% at 20°C, Maximum 50% at 35°C Maximum altitude of installation site: 1000 m above sea level 2018 vintage.