二手 ASM / ACCU-FAB Epitaxy / 1250 #156237 待售

EPI reactor Includes: ACCU-FAB 1250 max servo motion controller system: Power: 115 VAC +/- 10%, 50/60 Hz, Single Phase, 1500 VA Max EPI reactor loader Built to interface EPI reactor with a Smith interface (1) 8" cassette (up to 26 wafers) ACCU-FAB 1250 servo controller: 19" rack mountable chassis AT bus Two RS-232 ports 64k non-volatile CMOS memory (10) Relay outputs (12) Optically isolated inputs 5.25 or optional 3.5 floppy disk drive, hard disk, and 1 MB RAM Built-in CRT and keyboard ACCU-FAB Accubot: Compact, clean-room compatible Four-axis SCARA style robot Four independent joints, cassettes can be located side-by-side vs radially Range of Motion: Standard Axis 1 (Z): 9.25 Inches Custom Axis 1 (Z): 9.3 to 30.0 Inches available Axis 2: +/- 157 Axis 3: +/- 179 Axis 4: +/- 169 R1 (centerline A1 to centerline A2 = 15.0 inches to tool flange): 7.5 Inches R2 (centerline A2 to centerline A3): 7.5 Inches Repeatability: +/- .002 Inch Weight: 86 Pounds (Does not include the entire item or Shipping I believe) Maximum Speed: Axis 1: 10 in. /sec. Axis 2: 180 / sec. Axis 3: 180 / sec. Axis 4: 180 / sec. Accelerations: 32 inch / sec^2, 540 / sec^2 Payload: At maximum speed: 3 lbs. At reduced speed: 6 lbs. Allowable end effector moment of interia: .02 inch-pounds-sec^2.