二手 ASM Epsilon 2000 #9050020 待售

EPI Reactor, 8" Model 26 Stand-alone, single wafer Reactor module: Model RP for reduced pressure processing and ATM processing Vacuum load locks (scroll pump not included) Clean-room front with color touch screen operator interface (2) independent wafer cassette load locks Right-hand maintenance access configuration Automated wafer handling section with Bernoulli wand VAT – reactor gate valve Maintenance access: 2 0port in wafer handling chamber Epitaxy process chamber, susceptor and related quartzware for 200mm wafer processing Toshiba graphite: square Observation windows on maintenance access doors in wafer handling and process chamber sections 68040-based computer Operating system and software with 4.3 Gbyte hard disk drive Multiport Injector Flange with water cooling circuit Vibration Isolation Package HCl detector: reactor module Adjustable Spot Lamps Gas control module: Orbital welded 316L stainless steel, electropolished interior surface tubing Line and component connections via metal-gasketed fittings .003 micron point-of-use filtration AERA mass flow controllers: Model 7810/7820 Gas sampling ports Gas Loops: Nitrogen (N2) purge Hydrogen (H2) carrier and purge Hydrogen chloride (HCl) wafer and chamber etch Dopant #1, diborane (B2H6) P-dopant, diluent and inject Do pant #2, phosphine (PH3) or arsine (AsH3) N-dopant, diluent and inject Low flow hydrogen chloride (HCl) Auxiliary silicon source, dichlorosilane (SiH2Cl2, gas) Auxiliary loop for TCS with MFC and Lorex Piezocon controller Advanced application valving HCl detector – gas module Precision Vent Matching Power module: Single point, 3-phase, 60 Hz, 480 VAC power input Lamp array SCR packs 110 VAC/24 VAC power distribution circuits Power and load protection devices 0 ft. (15.2m) of interconnect wiring harness for remote operation Engineering console: Color touch screen operator interface Operator key lock control Temperature control digital electronics 50 ft. (7.6m) of interconnect wiring harness for remote operation Source cabinet with mini bubbler: 10-liter mini-bubbler H2 Detector HCl detector TCS/DCS.