二手 NOVELLUS C2 #293812977 待售

NOVELLUS C2
製造商
NOVELLUS
模型
C2
ID: 293812977
晶圓大小: 8"
優質的: 2006
Dual sequel express system, 8" (2) Sequel Express process chambers (Chambers A and B) (1) Empty chamber position (Chamber C) Brooks LPT 2200 Standard Mechanical Interface (SMIF) Shuttle type cassette loading Mag-7 dual blade buffer robot (2) MKS 10 / 1000 Torr pressure gauges (2) AE Mercury 3013 Radio Frequency (RF) matchers (2) AE RFG 5500 High Frequency (HF) generators (2) AE PDX-1400 Low Frequency (LF) generators (2) Watlow heater controllers (2) Sigma-6 Tetraethyl Orthosilicate (TEOS) liquid options PDP type Alternating Current (AC) rack (14) FC-7800CD Mass Flow Controllers (MFCs) Gas sticks for N2O, O2, N2, C2F6, NH3, and SiH4 2006 vintage.
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