二手 NOVELLUS CONCEPT 2 Altus 2 #9093687 待售
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ID: 9093687
晶圓大小: 8"
Chamber, 8"
Facility and Interface:
Altus module locations: Dual: Port 2 and 3
WTS (backbone) facilities connection configuration: Bottom facilities installation
Remote interconnect cables: 75 feet
Modular power distribution [MPD, DUAL, ALTUS, C2PDP]: 01-298450-11
DLCM-S:
ROBOT ASSY, MAG7, BISYMMETRIK ARM, DLCM: 02-262359-00
Transfer module to chamber valve (SMC Valve): 02-121427-00
Throttle valve kit, DLCM-S: 04-048579-02
Loadlock gate valve, SMC: 02-133799-00
Readiness kit: Dual altus ready
Software/Controls:
Module controller type: 02-272554-00, MC3
System controller type: 02-267883-00, MC3
System software (QNX): 5.1
DLCM-S IOC:
0 - IOC - 4.1
2 - IOC - 4.1
3 - IOC - 4.1
Altus IOC:
0 - SIOC - 4.30
1 - SIOC - 4.30
2 - SIOC - 4.30
3 (MPD) - SIOC - 4.10
Chase UI Kit: 02-117110-00
Process Chamber configuration:
SHWRHD, 200 mm, Style B: 03-00258-00
ASSY, PED, 200 mm MOER, D.3, SEMI: 02-033134-01
EXCL RING, 200 mm, 2.0 mm OH SEMI: 15-032777-00
Indexer plate, HUB: 15-034848-00
INDEXCER, WF, EXCL, OPTION, 200 mm: 15-00934-02
Spindle assembly: 02-126697-00
OPT ENDPT DET'R, MSTR, ALT-S: 04-0120458-00
Throttle Valve MKS (Pressure control valve): 27-250285-00
Gate valve, vat: 60-10015-00
Gas box configuration (CESCVD02177B):
Manifold A 1: Aera FC-7800CD, AR/2 SLM
Manifold A 3: Aera FC-7800CD, H2/20 SLM
Manifold B 6: Aera FC-7800CD, C2F6/2 SLM
Manifold B 7: Aera FC-7800CD, O2/2 SLM
Manifold D 2: Aera FC-7800CD, SiH4/100 SCCM
Manifold H D: Aera FC-7800CD, Ar/20 SLM
Manifold W 4: Aera FC-7800CD. AR/20 SLM
Manifold W 5: Aera FC-7800CD, WF6/1 SLM
Manifold C 8: Aera FC-7800CD, Ar/10 SLM
Manifold C 9: Aera FC-7800CD, H2/20 SLM
Baratron:
Altus, CAP MANOMETER, HEATED 100 TORR: 27-10340-00
Altus, CAP MANOMETER, HEATED 10 TORR: 27-10343-00
Altus, Backside, CAP MANOMETER< HEATED 100 TORR: 27-10340-00
DLCM-S, LOADLOCK, CAP MANOMETER, HEATER 100 TORR: 27-10340-00
DLCM-S, TM, CAP MANOMETER, HEATED 100 TORR: 27-10340-00
Supporting remote units:
(1) Process pump per process chamber: BOC Edwards, IH1000 - x2 for process pump typical
(1) Pedestal pump per process chamber: BOC Edwards, i80 - x2 for pedestal pump typical
(1) TM pump per system: BOC Edwards, i80 - x1 for TM pump typical
(1) LL pump per system, BOC Edwards, i80, x1 for LL pump typical.
NOVELLUS CONCEPT 2 Altus 2是NOVELLUS CONCEPT 2 Reactor平臺的雙頻雙源版本。該反應堆由兩級平板顯示器和模塊化控制設備監管，使其效率高，易於管理。它具有兩個可分別調節的高頻能量源，允許廣泛的過程控制。它具有先進的速度控制功能,可實現整個晶圓的精確過程控制和均勻性。該反應器還具有進行精確溫度和氣流調節的能力，進一步實現了專門薄膜沈積的確切工藝要求。CONCEPT 2 Altus 2反應器是基於傳統的感應耦合等離子體過程。它是一個單源的基於II-V的低壓平面反應堆，利用自偏來誘導等離子體。系統以兩個頻率運行；較低的源為13.65 MHz，較高的源為27.3 MHz。雙頻設置允許對過程進行更多的控制並提高性能。這兩種頻率設置還允許使用多個氣流，從而能夠精確控制沈積過程。專用面板安裝的監控單元用戶友好、高效。通過全過程監控和簡化參數處理，對沈積過程進行了嚴格控制。多加熱基板端口在開發過程時允許最大程度的靈活性。它具有內置的安全功能,使操作員能夠防止因操作員錯誤或設備更改而造成的不必要的過程更改。NOVELLUS CONCEPT 2 Altus 2反應堆為用戶提供了進行高級研究的可靠高效的機器。它具有靈活、模塊化的設計,能夠快速原型設計和實驗室規模的生產。它的綜合控制工具確保按照最嚴格的規範進行過程。這個最先進的反應堆不斷升級，以跟上IC制造業的最新技術和需求。CONCEPT 2 Altus 2反應器是制造各種薄膜結構的可靠高效的工具。
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