二手 NOVELLUS CONCEPT 2 Altus 2 #9093688 待售
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ID: 9093688
晶圓大小: 8"
Chamber, 8"
Facility and Interface:
Altus module locations: Dual: Port 2 and 3
WTS (backbone) facilities connection configuration: Bottom facilities installation
Remote interconnect cables: 75 feet
Modular power distribution [MPD, DUAL, ALTUS, C2PDP]: 01-298450-11
DLCM-S:
ROBOT ASSY, MAG7, BISYMMETRIK ARM, DLCM: 02-262359-00
Transfer module to chamber valve (SMC Valve): 02-121427-00
Throttle valve kit, DLCM-S: 04-048579-02
Loadlock gate valve, SMC: 02-133799-00
Readiness kit: Dual altus ready
Software/Controls:
Module controller type: 02-272554-00, MC3
System controller type: 2-267883-00, MC3
System software (QNX): 5.1
DLCM-S IOC:
0 - IOC - 4.1
2 - IOC - 4.1
3 - IOC - 4.1
Altus IOC:
0 - SIOC - 4.30
1 - SIOC - 4.30
2 - SIOC - 4.30
3 (MPD) - SIOC - 4.10
Chase UI Kit: 02-117110-00
Process Chamber configuration:
SHWRHD, 200 mm, Style B: 03-00258-00
ASSY, PED, 200 mm MOER, D.3, SEMI: 02-033134-01
EXCL RING, 200 mm, 2.0 mm OH SEMI: 15-032777-00
Indexer plate, HUB: 15-034848-00
INDEXCER, WF, EXCL, OPTION, 200 mm: 15-00934-02
Spindle assembly: 02-126697-00
OPT ENDPT DET'R, MSTR, ALT-S: 04-0120458-00
Throttle Valve MKS (Pressure control valve): 27-250285-00
Gate valve, vat: 60-10015-00
Gas box configuration (CESCVD02177B):
Manifold A 1: Aera FC-7800CD, AR/2 SLM
Manifold A 3: Aera FC-7800CD, H2/20 SLM
Manifold B 6: Aera FC-7800CD, C2F6/2 SLM
Manifold B 7: Aera FC-7800CD, O2/2 SLM
Manifold D 2: Aera FC-7800CD, SiH4/100 SCCM
Manifold H D: Aera FC-7800CD, Ar/20 SLM
Manifold W 4: Aera FC-7800CD. AR/20 SLM
Manifold W 5: Aera FC-7800CD, WF6/1 SLM
Manifold C 8: Aera FC-7800CD, Ar/10 SLM
Manifold C 9: Aera FC-7800CD, H2/20 SLM
Baratron:
Altus, CAP MANOMETER, HEATED 100 TORR: 27-10340-00
Altus, CAP MANOMETER, HEATED 10 TORR: 27-10343-00
Altus, Backside, CAP MANOMETER< HEATED 100 TORR: 27-10340-00
DLCM-S, LOADLOCK, CAP MANOMETER, HEATER 100 TORR: 27-10340-00
DLCM-S, TM, CAP MANOMETER, HEATED 100 TORR: 27-10340-00
Supporting remote units:
(1) Process pump per process chamber: BOC Edwards, IH1000 - x2 for process pump typical
(1) Pedestal pump per process chamber: BOC Edwards, i80 - x2 for pedestal pump typical
(1) TM pump per system: BOC Edwards, i80 - x1 for TM pump typical
(1) LL pump per system, BOC Edwards, i80, x1 for LL pump typical.
NOVELLUS CONCEPT 2 Altus 2是為優化工業加工效率而設計的反應堆技術。這種反應堆是一種經過增強的加工工具，其特點是能夠提高可靠性、更好的加工精度和更快的吞吐量。反應堆在很大的溫度範圍內運行，為工業部門提供了許多有用的特性。概念2 Altus 2反應堆的基本構型包括主體、閘門、發射器、控制外殼和晶片船等幾個部分。反應堆的主體由耐用材料制成，以確保壽命和安全。這個反應堆的閘門是一個關鍵部件--它是低能離子進入設備的部分。該反應堆的發射器與閘門配合工作，發射沈積和蝕刻過程所必需的帶電粒子。控制盤櫃包含電源、溫度控制和數據記錄系統,允許用戶優化過程。最後，晶圓船是容納目標材料並允許其轉移到系統中進行處理的部分。在沈積蝕刻過程中，用戶要調整溫度範圍、功率水平和壓力水平。為此，NOVELLUS CONCEPT 2 Altus 2反應堆提供了許多有用的功能。最先進的溫度控制器將溫度精確地保持在指定範圍內，而功率調節器則根據機組的要求調整功率輸入水平。這一過程也可以通過該反應堆提供的數據記錄機進行監控和調整。總體而言，CONCEPT 2 Altus 2反應堆是一種可靠高效的工藝工具，具有工業加工的實用特性。確保沈積和蝕刻過程中的精度、速度和安全性。這座反應堆還提供了較大的溫度範圍，以適應不同行業的需求。
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