二手 NOVELLUS CONCEPT 2 Speed #9140633 待售

NOVELLUS CONCEPT 2 Speed
反應爐
製造商
NOVELLUS
模型
CONCEPT 2 Speed
ID: 9140633
晶圓大小: 8"
優質的: 2000
Systems, 8" (3) Chambers Wafer shape: flat PET Module Module A: Shrink Process A: STI / IMD Module C: Shrink Process C: STI / IMD System UPS power Module B: Shrink Process B: STI / IMD Loadlock dry pump: LOT 105 Slit valve insert Slit valve type: SMC L-Motion TM dry pump model: LOT 105 Loadlock baratron: MKS TM Turbo pump: PFEIFFER TMH260 TM Throttle valve: MKS TM Baratron model: MKS Wafer sensor Fab installation EMO's (Turn to release) Front monitor: Stand alone UI rack Signal tower Module controller: MC1 Host interface: SECS Module A: Chamber type: Shrink Chamber process: STI / IMD Process clean type: In-situ Module controller: MC1 Module turbo pump: MAG2000 Manometer 1(10T): MKS7 750B Throttle valve: MKS 153D-15973 ESC / Dome cooling: PCW Temperature monitoring: NTM500C Manometer 2(10T): MKS 750B HF Generator: AE RFG5500 LF Generator: AE PDX 8000 RF Match: Mercury 3013 Manometer 3(100m): MKS 629B Dual clean injector kit Injector type: Single Louvered screen Pedestal lift type: Dual position Foreline type: Universal Injector size: 2" Module B: Chamber type: Shrink Chamber process: STI / IMD Process clean type: In-situ Module controller: MC1 Module turbo pump: MAG2000 Manometer 1(10T): MKS7 750B Throttle valve: MKS 153D-15973 ESC / Dome cooling: PCW Temperature monitoring: NTM500C Manometer 2(10T): MKS 750B HF Generator: AE RFG5500 LF Generator: AE PDX 8000 RF Match: Mercury 3013 Manometer 3(100m): MKS 629B Dual clean injector kit Injector type: Single Louvered screen Pedestal lift type: Dual position Foreline type: Universal Injector size: 2" Module C: Chamber type: Shrink Chamber process: STI / IMD Process clean type: In-situ Module controller: MC1 Module turbo pump: MAG2000 Manometer 1(10T): MKS7 750B Throttle valve: MKS 153D-15973 ESC / Dome cooling: PCW Temperature monitoring: NTM500C Manometer 2(10T): MKS 750B HF Generator: AE RFG5500 LF Generator: AE PDX 8000 RF Match: Mercury 3013 Manometer 3(100m): MKS 629B Dual clean injector kit Injector type: Single Louvered screen Pedestal lift type: Dual position Foreline type: Universal Injector size: 2" Power supply: 3￠, 5 Wires, 208V 2000 vintage.
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NOVELLUS CONCEPT 2 Speed是一種化學氣相沈積（CVD）反應器設備，設計用於在大型基板上建造保形薄膜。該系統的設計提供了高吞吐量和優越的工藝控制整個基板表面。CONCEPT 2速度反應堆采用模塊化設計，使用戶能夠配置其沈積系統，以最好地滿足其確切要求。NOVELLUS CONCEPT 2 Speed Reactor features a low-pressure CVD chamber which is agained a single-line, single-pass showerhead.淋浴頭能夠迅速均勻地向整個基質分配化學物質。這種高效的氣體分配技術有助於消除邊緣效應，並在整個表面提供均勻、均勻的沈積速率。CONCEPT 2 Speed僅使用最優質的設備構建。它旨在滿足最嚴格的質量控制要求，並確保精確和可重復的沈積過程。該裝置還設計為高效，使用戶能夠更快地用更少的材料制作更多的金屬化薄膜，從而節省時間和金錢。NOVELLUS CONCEPT 2 Speed Reactor包括一臺先進的過程控制機，旨在最大限度地提高過程性能和過程產量。該工具具有可靠的多參數過程控制模塊以及直觀的用戶界面。此外,還可以將資產配置為允許遠程監視、多腔同步和實時收益管理。CONCEPT 2 Speed非常適合廣泛的行業使用，包括微電子和太陽能電池板生產。該模型可與現有的NOVELLUS Foundry解決方案集成,為用戶提供滿足其所有沈積需求的單一來源。NOVELLUS CONCEPT 2 Speed反應器先進的腔室設計和工藝控制為用戶提供了高重復效率的優越保形薄膜沈積。
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