二手 NOVELLUS CONCEPT 3 INOVA-xT #9259673 待售
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ID: 9259673
晶圓大小: 12"
優質的: 2004
PVD System, 12"
Process: AL, TI(N)
Degas: Left and right
(2) Q300 AL
Q300 TIN
HCM TIN
HCM TAN
Cooler
EFEM / WTS-HV
EFEM:
Load port: (3) FOUPs
User interface location: Right with keyboard, mouse and monitor
User interface configuration: Clean room wall interface
(25) Wafers / FOUPs
BROOKS AUTOMATION Magnatran 7 ATM Robot
PEC Station
17-PEC Slots
Robot traverser
WTS-HV:
(2) Magnatran 7 Robots
Robot blades: Ceramic, dual
Cryo HUB
CTI-CRYOGENICS IS-8F (On-Board) Cryo pump
(6) VAT Isolation valves
Left and right load lock:
(2) PFEIFFER TMH 071P Turbo pumps
(2) VAT Isolation valves
Left and right degas:
(2) PFEIFFER TMU 521P Turbo pumps
(2) VAT Isolation valves
PFEIFFER / BALZERS TMH 071P Turbo pump
(2) Q300 AL and Q300 TIN:
On-Board Cryo pump
VARIAN V250 Turbo pump
On-Board Controller
Trust controller
MKS 649 Pressure controller
LPB
SIOC
ESC Pedestal
Mass flow controller: Ar, 200 SCCM
AERA FC-980C Mass flow controller: N2, 200 SCCM
AERA FC-980C UPC: 300 SCCM
INFICON Ion gauge
ANAFAZER Module
HCM TI and HCM TAN:
On-Board Cryo pump
VARIAN V250 Turbo pump
On-Board Controller
Trust controller
MKS 649 Pressure controller
LPB
SIOC
ESC Pedestal
Mass flow controller: Ar, 200 SCCM
MKS Mass flow controller: N2, 200 SCCM
AERA FC-980C UPC: 300 SCCM
AERA FC-980C Ion gauge
Anafazer Module
Miscellaneous parts:
AFFINITY EWA-23DK-HE04CBC Chiller
(3) POLYCOLD 1XCL Chillers
(4) CTI 9600 Compressors
Vacuum jacket lines
Cable box
Shield box
Spare parts
Desktop PC
MPD (WTS-HV)
General rack:
(2) ADVANCED ENERGY RFG 1251 RF Generators, P/N: 27-156759-00 / 3155107-101
Electric cabinet rack (Q300 AL):
TREK 684-1 ESC Power supply
CPI CPW2870B10 DC Power supply
Electric cabinet rack (Q300 TIN):
CPI CPW2870B10 DC Power supply
(2) Electric cabinet racks (HCM):
TREK 684 ESC Power supply
CPI CPW2870B10 DC Power supplies
(8) SORENSEN DLM 60-10 EM Coil power supplies
Missing parts:
BROOKS AUTOMATION Magnatran 7 Robot
2004 vintage.
NOVELLUS Concept 3 Inova XT是一個創新的反應堆，旨在擴展邏輯縮放技術的極限。反應堆使用模內蝕刻工藝來控制半導體晶片上特征的形狀、大小和輪廓。Inova XT反應器是微型化應用的理想選擇。Inova XT反應堆采用了獨特的專利通量腔設計，使其能夠實現高精度的精密蝕刻。反應堆由等離子體源組成，該等離子體源與可由單個操作員控制的航向和精細噴嘴設備集成在一起。該系統能夠產生明確定義的蝕刻輪廓,同時保持嚴格控制的蝕刻速率。Inova XT反應堆是為滿足先進工藝日益嚴格的要求而量身定制的。反應堆設有一個內置的浴缸蝕刻裝置，可主動清除最後的液滴和汙染物。消除與其他反應堆相關的混亂。這臺機器還有助於防止汙染，提高晶片對晶片的可重復性。Inova XT還能同時蝕刻，以及交錯蝕刻。交錯蝕刻允許操作員最小化拐角舍入並提高小型特征尺寸的吞吐量。反應堆的Flex-Etch技術還允許為特定應用定制配方創建。這允許用戶量身定制蝕刻工藝，以滿足其特定工藝或基材的需求。Inova XT還擁有經濟高效的解決方案設計。它的獨特架構大大減少了其他反應堆通常需要的零件和泵的數量。這減少了運營費用和能耗。此外，反應堆還包括內置的自適應靈活性，以減少過程間切換所需的時間。概念3 Inova XT是一個令人難以置信的蝕刻反應器，它以蝕刻特性的效率提供了晶片的精確度。Inova XT反應器憑借其專利的通量腔設計和內置的沐浴蝕刻工具，是一種經濟高效的解決方案，可以幫助半導體制造商在降低能源成本的情況下實現針點精度、優越的重復性和提高吞吐量。
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