二手 NOVELLUS Concept 3 Speed Max #9259681 待售
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ID: 9259681
CVD System, 12"
Wafer type: Notch
Signal tower
PEC Module
Foop: BROOKS AUTOMATION
Foop type: 3-Port
BROOKS Magnatran 7 TM Robot
TM Robot blade: Ceramic
Load lock convectron: 275 min
L/L Baratron: MKS
TM Baratron: MKS
L/L Slit valve type: VAT
Module slit valve type: SMC
PFEIFFER TM Turbo pump
MKS TM Throttle valve
VAT TM Line valve
BROOKS AUTOMATION ATM Robot
ATM Robot blade: Arm metal
AWC Sensor
UI Type: LCD
EMO's: Push button
Host interface: SECS
Chaser: CRT Monitor
IOC Version: 4.72
SSD Type: C3-PDRS
(3) SMC XGT300-30-1A-X2 TM Value, P/N: 60-251903-00
Load lock value: VAT 03012-LA24-0001/0503, A-62591
Chamber A, B and C:
Chamber type: Speed max
Chamber process: ILD
ESC Type: Notch
Manometer (10T): MKS
Manometer (30T): MKS
Manometer (100m): MKS
Throttle valve: NC TBV-IQA-200-NW-50
Dual pedestal lift
LEYBOLD MAG200CT Turbo pump
ESC / Dome Cooling
Dual clean injector kit: Single RPC
Process clean type: RPC
Temperature monitoring: Dome monitor 201
ADVANCED ENERGY 10013 Navigator RF Match
VERITY EPD, P/N: 1005972
Black shield
MOOG SMART Motor
No module dry pump
Chamber A:
Type / Make / Model / Gases / Size
MFC / BROOKS AUTOMATION / SLA 7950S / O2 / 500 SCCM
MFC / BROOKS AUTOMATION / SLA 7950S / NF3 / 5 SLM
MFC / BROOKS AUTOMATION / SLA 7950S / H2/CF: 0.727 / 1.5 SLPM
MFC / BROOKS AUTOMATION / SLA 7950S / Ar / 3000 SCCM
MFC / HORIBA / Stec (Z500, SEC-Z512MGX) / N2 / 300 SCCM
MFC / HORIBA / Stec (Z500, SEC-Z512MGX) / SiH4 / 200 SCCM
MFC / BROOKS AUTOMATION / SLA 7950S / Ar / 500 SCCM
MFC / BROOKS AUTOMATION / SLA 7950S / HE / 1000 SCCM
Chamber B:
Type / Make / Model / Gases / Size
MFC / BROOKS AUTOMATION / SLA 7950S / O2 / 500 SCCM
MFC / BROOKS AUTOMATION / SLA 7950S / NF3 / 5 SLM
MFC / BROOKS AUTOMATION / SLA 7950S / H2 / 1500 SCCM
MFC / BROOKS AUTOMATION / SLA 7950S / Ar / 3 SLPM
MFC / BROOKS AUTOMATION / SLA 7950S / SiH4 / 100 SCCM
MFC / BROOKS AUTOMATION / SLA 7950S / SiH4 / 200 SCCM
MFC / BROOKS AUTOMATION / SLA 7950S / Ar / 500 SCCM
UPC / BROOKS AUTOMATION / SLA 7950S / HE / 1000 SCCM
Chamber C:
Type / Make / Model / Gases / Size
MFC / BROOKS AUTOMATION / SLA 7950S / O2 / 500 SCCM
MFC / BROOKS AUTOMATION / SLA 7950S / NF3 / 0.5 SLPM
MFC / BROOKS AUTOMATION / SLA 7950S / H2 / 1500 SCCM
MFC / BROOKS AUTOMATION / SLA 7950S / Ar / 3000 SCCM
MFC / BROOKS AUTOMATION / SLA 7950S / SiH4 / 100 SCCM
MFC / BROOKS AUTOMATION / SLA 7950S / SiH4 / 200 SCCM
MFC / BROOKS AUTOMATION / SLA 7950S / Ar / 500 SCCM
UPC / BROOKS AUTOMATION / SLA 7950S / HE / 1000 SCCM
Missing parts:
MC3 Controller: MKS AX7670-21 3L Remote Plasma Source (RPS)
NTM Delta controller
PDX 5000 / PDX 8000 / Apex 10K Generators
Turbo pump controllers
Missing parts for chamber A, B and C:
Apex 10013 HF Generator
PDX 8000 MF Generator
PDX 5000 LF Generator
NTM
Uninterruptable Power Supply (UPS): 208 V, 50/60 Hz, 4-Wires
Power supply: 208 V, 50/60 Hz, 5-Wires
2007 vintage.
NOVELLUS Concept 3 Speed Max是一種先進的化學氣相沈積(CVD)反應器,設計具有改進的材料膜形成和工藝時間縮短能力。它主要用於半導體工業,特別是用於電介質和金屬的沈積。Speed Max反應堆由反應室、過程氣體輸送設備、控制系統和加熱單元組成。反應室是一個玻璃封閉的不銹鋼容器,配有自動附件,以確保準確的沈積速率。該工藝氣體輸送機能夠控制和調節氣體壓力、溫度和濕度。加熱工具功能強大,可維持整個腔室的均勻溫度。反應堆還配備了先進的控制資產,能夠準確處理工藝壓力、溫度、氣流以及沈積速率等工藝參數。對腔室條件的實時監測,包括溫度、壓力和氣流,也可以通過這個模型進行。Speed Max還具有獨特的批處理式沈積,旨在最大程度地減少材料沈積時間。反應堆可以預先編程,以預定的批次沈積薄膜,從而實現更快的自動化生產。此外,該設備還可以配置多個基板支架,以進一步加快這一過程。該反應器還被設計為提供卓越的工藝重復性,這對於確保令人滿意的薄膜形成至關重要。此外,系統的高級軟件可確保可重復的過程結果,而不管環境條件如何。最後,該軟件還有助於診斷和優化任何潛在的流程問題。概念3 Speed Max是功能強大且高度先進的反應堆,也是半導體制造商必備的。它保證了最精確、最快速的沈積過程,並具有可重復的結果。Speed Max現在為那些正在尋找最新沈積方法的業界人士提供了競爭優勢。
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