二手 NOVELLUS Inova XT #9393590 待售
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ID: 9393590
晶圓大小: 12"
PVD System, 12"
BROOKS MAG7 Robot
NOVELLUS MC3 Module controller
PFEIFFER Turbo and controller
(3) CTI / HILEX / BROOKS Cryo pumps
(4) BROOKS FOUP Cassette wafer loaders
VAT Throttle valve and controller
ADVANCED ENERGY PDX 5000 RF Generator
ADVANCED ENERGY RFG 5500 RF Generator
MKS RF Generator
PVD Chamber
Preclean chamber
Right degas chamber
Left degas chamber
Sputter
Transfer module with dual blade
Dual brooks robot transfer
DC power supply
Qty / Part number / Make / Model / Description
(1) / PA07060 / TREK / - / Power supply
(2) / DCS80-13E / SORENSEN / - / DC Power supplies: 0-80 V, 0-13 A / 1000 W
(1) / CPW2870B10 / CPI / - / 27-251231-00 DC Sputtering power supply
(1) / 3155051-015A / ADVANCED ENERGY / RFG 5500 / M/N: 3155051-015A RF Generator
(1) / 684-1 / TREK / - / NOVELLUS R19-137359-00, 416092, ESC Power supply: 6 Phase
(1) / RPG-50 / MKS / ENI / RPG-50A / Bipolar pulsed DC Generator
(1) / 27-156757-00 / ADVANCED ENERGY / PDX 5000 / RF Generator, M/N: 3156043-204
(1) / 03-12785-00 / NOVELLUS / - / 02-128733-00 PVD Assy SIOC Controller
(1) / 02-288084-00 / NOVELLUS / - / WTS-HV Sesioc 0, Rev.A
(1) / 02-271697-00 / NOVELLUS / - / WTS-HV Sesioc 3 IXT, Rev.A
(1) / 02-266875-00 / NOVELLUS / - / 02-266875-00 4 IXT WTS HV 4
(1) / 02-253704-00 / NOVELLUS / - / ASSY MC3E Controller with Ethernet 75-261867-00
(1) / 02-257935-00 / NOVELLUS / - / MC3E Platform controller with Ethernet 79-257795-00
(2) / 651D-16202 / MKS / - / Throttle valve controllers
(1) / TMH 071 P / PFEIFFER / BALZERS / - / Turbomolecular
(1) / 02112-BA24-APN1/0022 / VAT / - / Rectangular gate valve pneumatic actuator A-290319
(1) / 02112-BA24-APN1/0017 / VAT / - / Rectangular gate valve pneumatic actuator A-276468
(1) / 02112-BA24-APN1/0018 / VAT / - / Rectangular gate valve pneumatic actuator A-276468
(1) / 02112-BA24-APN1/0002 / VAT / - / Rectangular gate valve pneumatic actuator A-335571
(1) / 02112-BA24-APN1/0008 / VAT / - / Rectangular gate valve pneumatic actuator A-276468
(1) / 02112-BA24-APN1/0016 / VAT / - / Rectangular gate valve pneumatic actuator A-276468
(1) / 02112-BA24-APN1/0024 / VAT / - / Rectangular gate valve pneumatic actuator A-290319
(1) / 02112-BA24-APN1/0019 / VAT / - / Rectangular gate valve pneumatic actuator A-288644
(1) / 02112-BA24-APN1/0004 / VAT / - / Rectangular gate valve pneumatic actuator A-276468
(1) / 02112-BA24-APN1/0002 / VAT / - / Rectangular gate valve pneumatic actuator A-276468
(1) / 02112-BA24-APN1/0434 / VAT / - / Rectangular gate valve pneumatic actuator A-529666
(1) / 02112-BA24-APN1/0023 / VAT / - / Rectangular gate valve pneumatic actuator A-290319
(1) / - / PFEIFFER / TMU521P / PM P03 120H, PM P03 120 C with TC750-E74, PM C01 712, Turbo pump
(1) / - / PFEIFFER / TMU521P / PM P03 855 with TC750 Special DS15, PM C01 711, Turbo pump
(1) / - / PFEIFFER / TMH 071 P/ Turbomolecular pump with TC750-E74, PM C01 712
(1) / 8116079G001 / CTI-CRYOGENICS / - / Cryo pump, HELIX Control sputtering
(1) / 14036-PE24-0004 / VAT / - / Gate valve 14036-PE24-0004
(1) / 003-1600-25 / BROOKS / Magmatran 7 / Wafer transfer robot
(1) / 002-7090-03 / BROOKS / - / Wafer transfer robot
(1) / - / PFEIFFER / TMU 1001 P / Turbo pump PM P02 875, DN 200CF-F, 3P With TC-750 SPECIAL DS15 PMC01 711
(1) 27-265775-00 / NOVELLUS / AE Mercury 3013 Match, 3150274-009.
NOVELLUS Inova XT是為下一代器件制造而設計的多室半導體加工設備。該系統配有三個化學隔離室，每個室都有不同的工藝模塊，可以配置為滿足任何應用的具體要求。它具有出色的熱處理、蝕刻、沈積和清潔應用，所有這些都具有最低的交叉汙染風險。Inova XT的第一室專門用於沈積過程。這包括等離子增強化學氣相沈積（PECVD）、原子層沈積（ALD）或物理氣相沈積（PVD）。該腔室還能夠使用化學Etch™或噴霧工藝進行幹蝕刻。它也與各種源材料兼容，其柔韌性允許它用於介電、金屬、屏障和三維（3D）沈積等應用。第二室和第三室都用於蝕刻過程。第二室專門設計用於淺溝隔離和矽局部氧化（STI/LOCOS）蝕刻工藝。NOVELLUS Inova XT的設計旨在通過廣泛的工藝氣體、可變射頻輸出和直接向下的晶圓傳感來精確控制蝕刻深度和特征傳輸,以實現最小的粒子生成。第三室還配備了利用電離團簇光束（ICB）和反應性離子蝕刻（RIE）進行幹蝕刻的工藝。它提供多種金屬、電介質和其他材料的精密蝕刻工藝。Inova XT以其先進的工藝工程軟件提供高精度的工藝控制。這個自動化單元可以實時跟蹤氣體流動、溫度、壓力、功率水平和其他參數。還配備了快速周轉時間、穩健控制、錯誤監控、內置安全報警、自動關機等穩定安全功能，確保了高品質的終端產品。總體而言，NOVELLUS Inova XT是一款功能強大且可靠的工具，專為先進的半導體處理應用而打造。其多室架構和廣泛的沈積和蝕刻能力使其成為各種應用的理想選擇。其先進的工藝軟件和安全功能使其成為任何希望獲得最大效果的用戶的可靠且經濟的解決方案。
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