二手 NOVELLUS Inova #9178318 待售
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ID: 9178318
晶圓大小: 8"
優質的: 2008
PVD System, 8"
Sputter deposition
Cu Seed
Main system:
Mainframe
Transfer
Load
Aligner
Cool
Degas chamber
Loadlock
(2) LPT2000 SMIF Systems
Handler system:
3-Axis trust control ConMag II robot assy
With ceramic blade (Transfer robot)
AWC BROOKS Mag 7 robot assy
With ceramic end effector (FE Robot)
Process chambers:
Ta
Cu
DMC
Hardware:
Main power distribution
Transformer
AC Control / Generator rack
(4) 9600 Cryo compressors
Mydax chiller
Polycold
Affinity chiller
(4) Dry pumps
Missing parts:
DMC LF Generator
DMC Turbo pump
Cu Chamber water box
Cu Chamber SIOC
Ta Chamber SIOC
Degas EV block
Ta EV Block
PVD Chamber quartz lamp
Loader ion gauge
Aligner lamp
HF Match
Degas table
CIP & Upgrades:
Ta Chamber process kit: SST Process kit
Ta HCM Target: Dual coil Ta with short lip
Damaclean dome shield: Single piece
HCM Cu Target: 3/4" HCM Cu Thickwall target
ESC Chuck: Rev2
Degas stn leak chk port (Front end)
Degas flexline
PVD Chamber flexline (Ta/Cu)
PVD Chamber HCM (Ta/Cu): Metal strain relief
PVD Chamber RGA port
Loadlock ion gauge port extension
PVD Chamber condensation control (Ta/Cu)
Dual loadlocks:
Chord mapping
Cryo baffle plate
Cryo pumps: CTI CRYOGENIC 8" F
Cryo pumps compressor: HELIX CTI 9600
Convectron gauge: GRANVILLE PHILIPS 275821 Mini-convectron
Ion gauge: GRANVILLE PHILIPS 354001-YG-T Micro-ion mod
LL Short light curtain
PEC Cassette nests
Gate valve shield assy:
VAT Rectangular gate valve MONOVAT classic
With gate compl (Gate aluminum with viton seal)
Wafer handler / Frontend CHM:
Robot arm: Ceramic
Cryo pumps: CTI CRYOGENIC 8" F & 4"
Cryo pumps compressor: HELIX CTI 9600
Convectron gauge: GRANVILLE PHILIPS 275821 Mini-convectron
Ion gauge: GRANVILLE PHILIPS 354001-YG-T Micro-ion mod
Degas station:
Degas station: 4pt Mechanical clamp
AERA FC-7800CD MFC 4 argon: 1.0/20
Cool station:
Standard
AERA FC-7800CD MFC 3 Argon: 1.0/100
Stage O-ring groove size: 0.121-0.124"
Transfer module:
Cryo pump: CTI CRYOGENIC 8" F
Cryo pumps compressor: HELIX CTI 9600
Robot: AWC BROOKS Mag 7
Robot end effector: Ceramic
Lid cover: Clear lid
Convectron gauge: GRANVILLE PHILIPS 275821 Mini-convectron
Ion gauge: GRANVILLE PHILIPS 354001-YG-T Micro-ion mod
Gate valve shield assy:
VAT Rectangular gate valve MONOVAT classic
With gate compl (Gate aluminum with viton seal)
Damaclean module:
Cylinder source: Ceramic
Gas box: (3) Gases
RF p/s: ADVANCED ENERGY RF 10s & LF 10WC
Plasma shield: Stationary
Pump: Varian V 701 VT
Stage: Non-ESC
Shield kit: Standard DMC non ESC
Convectron gauge: GRANVILLE PHILIPS 275821 Mini-convectron
Ion gauge: GRANVILLE PHILIPS 354001-YG-T Micro-ion mod
Manometer gauge: MKS Inst 627B.1TBD1B 100mT/0.1
AERA F-7800CD MFC 4 H2: 1.0/50
AERA F-7800CDMFC 1 Ar: 1.0/50
Gate valve shield sssy:
VAT Rectangular gate valve MONOVAT classic
With gate compl (Gate aluminum with viton seal)
Ta(N) Chamber:
Cryo pump: CTI CRYOGENIC 8" F
Cryo pumps compressor: HELIX CTI 9600
Ar MFC
N2 MFC
Convectron gauge: GRANVILLE PHILIPS 275821 Mini-convectron
Ion gauge: GRANVILLE PHILIPS 354001-YG-T Micro-ion mod
Manometer gauge: MKS Inst 627B.1TBD1B 100mT/0.1
Argon BSG manometer gauge: MKS Inst 750B11TCB2GA
AERA FC-7800CD MFC 3 N2: 1.0/200
AERA FC-7800CD MFC 1 Ar: 1.4/100
MKS UPC 1 Ar: 1.0/10
Shield kit:
Shield support ring, RF FF: Ceramic
RF Plug: Ceramic
Gate valve shield kit not installed
Arc sprayed SST:
Assy, anode, HCM
Shield adapter
Deposition shield
ESC Table shield
Weight clamp, RF
Bottom shield
Source:
DC p/s: CPI 36 KW
D-Coil
M-Coil
Source magnet: Array
Top magnet: Rotating
Target: Ta
ESC Power supply: TREK 684-I
Table:
Assy, table, HCM
POLYCOLD N2 Cooling lines: Vacuum-jacketed
MKS UPC
Stage: ESC With active cooling
Heat exchanger for chilled N2 exhaust
Z-Table
RF Ready
Gate valve shield assy:
VAT Rectangular gate valve MONOVAT classic
With gate compl (Gate aluminum with viton seal)
Cu Chamber:
Cryo pump: CTI CRYOGENICS 8" F
Cryo pumps compressor: HELIX CTI 9600
Ar MFC
Convectron gauge: GRANVILLE PHILIPS 275821 Mini-convectron
Ion gauge: GRANVILLE PHILIPS 354001-YG-T Micro-ion mod
Manometer gauge: MKS inst 627B.1TBD1B 100mT/0.1
Argon BSG manometer gauge: MKS inst 750B11TCB2GA
MFC:
AERA FC-7800CD MFC 3 N2: 1.0/200
AERA FC-7800CD MFC 1 Ar: 1.4/100
MKS UPC 1 Ar: 1.0/10
Shield kit:
ESC Clamp: Grit blasted
Assy, anode, HCM: Grit blasted SST
Shield adapter: Grit blasted SST
Gate valve shield kit
Grit blasted, Non RF:
Deposition shield
ESC Table shield
Bottom shield
Source:
DC p/s: CPI 36 KW
D-Coil
M-Coil
Source magnet: Array
Top magnet: Rotating
Target: Cu
ESC Power supply: TREK 684-I
Table:
MYDAX Fluid cooling line: Vacuum-jacketed
MKS UPC
Stage: ESC With active cooling
Z-Table
Gate valve shield assy:
VAT Rectangular gate valve MONOVAT classic
With gate compl (Gate aluminum with viton seal)
Auxiliary subfab equipment:
Cu Chamber chiller: MYDAX 1-VLH7-WB
Ta Chamber chiller: POLYCOLD 152-WC-CE/S2
System DI water chiller: Affinity E series EWA-15DK-GE06CBC0 chiller
Dry pumps: EBARA EV-S20N (High efficiency pump)
Main power distribution: Cutler hammer cabinet C2/Inova
ECR: C2/Inova ECR 208 VAC, (3) racks
2008 vintage.
NOVELLUS Inova是由NOVELLUS Systems Inc開發的最先進的化學氣相沈積（CVD）反應堆。這個高度先進的腔室包含許多產品,為半導體制造操作提供了卓越的工藝解決方案。Inova是一個可擴展的平臺,可為當今高級流程節點和設備結構的前端和後端生產提供廣泛的流程功能。NOVELLUS Inova具有兩種截然不同的CVD解決方案：Express™和Prime。該Express™是一種單晶片、低真空的CVD解決方案,非常適合低溫工藝,如III-V和CMOS材料層的反向處理,提高了擁有成本。此外，Express能夠處理細膩、薄薄的氧化物和氮化物層，通常用於先進晶體管的平面化和定位，有助於降低代價高昂的汙染風險。第二種產品Prime是一種多晶片、高真空CVD系統,非常適合用於finFET和FEOL工藝的薄膜。Prime先進的溫度控制技術保證了您所有批次的可重復性-最大限度地減少顆粒生成並確保完美的薄膜沈積。除了提供領先的CVD工藝能力外,Inova反應堆還提供業界最先進的現場測量和工藝控制能力。其掃描電子波長色散X射線（SEM-WDX）和光學計量學,具有用戶定義的測量參數,能夠實時監測和控制所有重要的過程參數。這允許最大限度地優化蝕刻或沈積過程,並確保精確的過程控制精度,這實際上有助於消除臨界尺寸（CD）錯誤。NOVELLUS Inova反應堆還提供先進的自動化和遠程監控功能,以實現最大的正常運行時間和過程控制。其直觀的用戶界面為自動化配方創建和實施提供了一個高效的平臺,以簡化您的操作。此外,其先進的遙測功能支持遠程故障排除和問題解決,有助於最大程度地減少停機時間。總之，Inova是一個市場領先、最先進的反應堆，旨在滿足當今納米級器件結構嚴格的工藝控制要求。它的功能範圍允許用戶訪問最新的流程功能和高級自動化功能,以實現最大的流程控制和正常運行時間。其先進的現場計量功能以及復雜的自動化和遠程監控功能確保了最大的正常運行時間和過程控制準確性。
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