二手 AMAT / APPLIED MATERIALS VeritySEM 2 #9094373 待售

Critical Dimension Scanning Electron Microscope (CD-SEM), 12" Includes: Thermally assisted field emission electron gun Patented electron optics (YAP detector included) SEM Autofocus and auto stigmation module (3) Open cassette ports, 12" Standing / Sitting operator console 3D Sidewall imaging Signal tower Thermal video and alphanumeric printers Central recipe database server Metrology Lines and CH slope: (2) Angle, (2) Height Repeatability: L-0.45 nm, CH-0.55 nm (1) 1°/ 1° / 1° 10 nm / 10nm / 17nm Reproducibility: L-0.45 nm, CH-0.55 nm (1) 1° / 1° / 1° 10 nm / 10nm / 17nm VeritySEM2: 0.9 nm Imaging: Image resolution: 1.65 nm at (4) 800, 0 V Side wall imaging: (5) 15° Tilt at 4 directions HAR Imaging: 1:30 Features (7) ABW: 10.5 nm Accelerating voltage: 0.2 kV - 2.5 kV Extraction voltage up to 4 kV Probe current: 5 pA - 500 pA System performance: Throughput: (6) Lines / Spaces slope / Height 5 Sites / Wafer: 65 WPH 13 WPH 20 Sites / Wafer: 33 WPH PR Success rate: 99.70% MTBF: 1,000 Hours MTTR: 4 Hours MTBA: 24 Hours Availability: 95% Wafer particle contamination: Front 0.09 um particles 25 PWP / Wafer (With mini environment) Front 0.2 um particles 5 PWP / Wafer (With mini environment) Back 0.2 um particles 3000 PWP / Wafer (With mini environment) Equipment parameters: Wafer size: 6"-12" Optical magnification 16x, 220x (FOV: 450 mm - 6000 mm) SEM magnifications: 1,000x to 400,000x (100 mm - 0.25 mm) Stage: 300 mm/s With continuous motion trackball Host: 19.4 CBM FFU: 2.0 CBM Workstation: 2.5 CBM UPS, Chiller and electric disk: 2.1 CBM Does not include dry pump 2003 vintage.