二手 AMAT / APPLIED MATERIALS VeritySEM 2 #9359397 待售

Critical Dimension Scanning Electron Microscope (CD-SEM), 6"-12" Upgraded from VeritySEM Hard Disk Drive (HDD) not included Thermally assisted field emission electron gun Patented electron optics (Including YAP Detector) SEM Autofocus and autostigmation module (3) Open cassette ports, 12" Standing / Sitting operator console 3D Sidewall imaging Signal tower Central recipe database server (Tower type) Repeatability: Lines and CH-L-0.45nm CH-0.55nm Slope angle STI/DD / Litho: 1deg / 1deg / 1deg Height STI / D.Dam / Litho: 10nm / 10nm / 17nm Reproducibility: Lines and CH L-0.45nm CH-0.55nm Slope angle STI / DD / Litho: 1deg / 1deg / 1deg Height STI / D.Dam / Litho: 10nm / 10nm / 17nm Matching: Lines and CH 0.9nm Imaging: Image resolution: 1.65 nm at 8000 V Side wall imaging: 15 ° tilt at 4 directions HAR Imaging: 1:30 Features ABW: 10.5 nm Accelerating voltage: 0.2 kV to 2.5 kV Extraction: Up to 4 kV Probe current: 5 pA - 500 pA Throughput: 5 Sites / Wafer: Lines / Spaces 65 WPH Slope / Height 13 WPH 20 Sites / Wafer: Lines / Spaces 33 WPH MTBF: 1,000 hours MTTR: 4 hours MTBA: 24 hours Availability: 0.95 Wafer particle contamination: Front 0.09 um particles: 25 PWP / Wafer Front 0.2 um particles: 5 PWP / Wafer Back 0.2 um particles: 3000 PWP / Wafer Carbonization: 0.05 nm per visit Parameters: Optical magnification: 16x, 220x SEM Magnifications: 1,000x to 400,000x Stage: 300 mm/s With continuous motion trackball 2004 vintage.