二手 HITACHI S-8840 #9214004 待售
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ID: 9214004
晶圓大小: 6"-8"
優質的: 1997
Critical Dimension Scanning Electron Microscope (CD-SEM), 6"-8"
Workstation:
Model: B180L
Operating system: HP Unix
SEMI / JEIDA: Flat / V Notch wafers
Measurement method: Curser / Line profile
Measurement range: 0.1 ~ 11 µ m
Measurement repeatability: ±1% / 2 nm (3s)
Throughput: 26 Wafers / Hour
Secondary electron image resolution: 5 nm
Image magnification: 1,000x ~ 150,000x
Measurement points:
1 Point / Chip
(5) Chips / Wafer
Electron optics system:
Electron gun: Schottky emission type
Accelerating voltage: 500 to 1300 V
Lens system: Electromagnetic condenser lens system and FCM objective lens
Secondary electron detection method: 2-Stage electromagnetic deflection
Objective lens aperture: Heating type movable aperture with fine adjustment
Scanning method: 2-Stage electromagnetic method
Astigmatism correction method: 8 Polar electromagnetic method (X and Y axis)
Monitor: Faraday cup incorporated with automatic measurement function
Optical microscope: 1.2 mm² Visual field, monochrome image
Stage:
Movement range:
X and Y: 0 ~ 200 mm
Driving method: Pulse motor
Computer controlled operation
Speed: Maximum 51 mm/s
Wafer transfer robot method:
(2) Cassettes random access method
Wafer detection inside cassette: Arm type robot
Vacuum chucking method
Orientation flat / V Notch detection: Non-contact automatic detection method
Control and display system:
Observation control CRT:
EWS (GUI) LCD Monitor
Integral processing image display
Interactive computer operation
Wafer map display
Measured value indication
Stage coordinate indication
Scan mode:
TV Scan
Raster rotation
Auto brightness / Contrast control
Image processing:
Photographic recording unit
Effective visual field 80 x 80 mm
Safety device: Mushroom type EMO switch
Measurement data processing system:
File storing function:
3.5" Floppy disk drive
3.5" Magneto optic disk drive
With storage
Recording media:
Hard disk with EWS
3.5" Magnetic optical disk
3.5" Floppy disk
Print output: 80 Digit thermal printer
Evacuation system:
Method: Automatic dry cleaning evacuation system
Vacuum pumps:
(3) Ion pumps
(2) Turbo molecular pumps
(2) Oil rotary pumps
Safety devices:
Power fail / Vacuum level safety devices
1997 vintage.
HITACHI S-8840是一種掃描電子顯微鏡（SEM），專為精密、高分辨率的應用而設計。HITACHI S8840允許研究微米至亞微米範圍內材料和器件的納米結構。高功率、低壓電子束能夠產生導體、絕緣體和半導體的詳細圖像，分辨率為40 nm，放大倍率範圍為20倍至500 000倍。S 8840配備了先進的技術，可以進行高質量的成像和分析。該顯微鏡利用了低的、無損的電子束和先進的信號處理系統，大大減少了圖像失真。強大的信號處理器提供清晰的信噪比,同時提供準確的信號輸出和詳細的3D圖像。S8840還提供了探針探測器的選擇，包括用於獲取高質量視頻圖像的CCD攝像頭和超高靈敏度場發射探測器。低電流檢測器提供高達每秒超過100萬個電子的動態範圍，使用戶能夠檢測到電子束條件的微妙變化。顯微鏡還配備了真空室，能夠保持10⁻⁶bar真空，適用於材料科學和半導體應用。HITACHI S 8840具有用戶友好的圖形用戶界面和全套軟件工具，以及一系列選項和配件，使其適合各種苛刻的應用。顯微鏡支持能量色散X射線光譜（EDS）和能量過濾成像（EFI）進行元素分析和材料元素組成研究。SEM還可用於觀察晶體結構和材料的紋理，從而更好地表征微積木的結構和性能。此外，S-8840提供了一個激光光束感應發光（LBIC）系統，可以對樣品進行目視檢查、對比度增強和自動分析。SEM還配備了用於樣品制備的高精度等離子體蝕刻系統、用於加熱樣品的氣體入口以及輔助樣品操縱和定位的支撐臂。HITACHI S-8840是一種先進的掃描電子顯微鏡，能夠提供高分辨率圖像和有價值的數據分析。它是一種可靠、高性能的儀器，適合廣泛的研究用途。
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