二手 LEO / ZEISS 1450VP #293755515 待售
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ID: 293755515
Scanning Electron Microscope (SEM)
E-Beam lithography
Resolution: 3.5 μm
Magnification: 15x- 300,000x
Electrostatic beam blanker
Stage max movements X,Y,Z and R,T: 100, 125, 35 and 360, 90
Electron gun: LaB6
Turbo / Ion pump
SE Detector
Pattern generator: ELPHY quantum
Probe current: 10-12, 10-7 A
Acceleration voltage: 200 V, 30 kV.
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