二手 AMAT / APPLIED MATERIALS 0010-11681 #9213297 待售
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ID: 9213297
Ceramic heaters for Producer, 12"
Cer plate: P/N: 0040-07033
Uniformity / Temperature test:
Check point:
480 Degree C (TC)
Maximum: 551.7, minimum: 548.3
Heating rate: 10℃/min
TC Wafer: 17 Points
Uniformity (Below 3%): 3.4 %
Heater surface:
High of dimples: 30±10 μm, 32 μm
Flatness: 0.02~0.08 μm, 0.06 μm
Plate thickness (16.50 mm): 15.70~16.50 mm, 16.50 mm
Rods:
Resistivity of electrodes: 2.5~3.5 Ω, 2.8 Ω
Chucking terminal (after polishing): 2.5-3.52 Ω, 2.9 Ω
RF Electrode (ground)
Al Cap:
Leak test 1 X 10E-9 cc/s, He, 10E-9 cc/s
O-Rings
Chucking test: ±300 V / Bi -Polar type.
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