二手 AMAT / APPLIED MATERIALS 0010-16858 #9355729 待售

ID: 9355729
晶圓大小: 12"
Electrostatic chucks (ESC) for Endura, 12" Process: 10 nm Type: Bipolar Flatness: 0.0009" Operating voltage: 500 VDC Leakage voltage: 800 VDC Residual pressure: <5 Torr Maximum pressure: >12 Torr Backside pressure / Helium leak rate 4 Torr / 0.3 SCCM 6 Torr / 0.4 SCCM 8 Torr / 0.5 SCCM.
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