二手 AMAT / APPLIED MATERIALS Chamber for Producer GT #9270760 待售
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ID: 9270760
晶圓大小: 12"
12"
Process: SiCoNi
(2) FI20620-1 Remote Plasma Sources (RPS)
ADVANCED ENERGY APRX3013 RF Generator
PCB’s:
Slot1 / CDN491
Slot2 / CDN491
Slot3 / CDN491
Slot4 / CDN496
Slot5 / CDN496
Slot6 / Interlock module
Slot7 / Interlock module
Slot8 / SIG COND
Gas configuration:
Make / Model / Gas / Maximum flow
UNIT / IFC-125 / NF3 / 300 SCCM
UNIT / IFC-125 / NH3 / 600 SCCM
UNIT / IFC-125 / H2 / 5000 SCCM
UNIT / IFC-125 / He / 3000 SCCM
UNIT / IFC-125 / Ar / 2000 SCCM
UNIT / IFC-125 / Ar / 1000 SCCM
UNIT / IFC-125 / Ar / 2000 SCCM
UNIT / IFC-125 / Ar / 20000 SCCM
MKS / 1179A00411CR1BV / Ar / 10 SCCM
MKS / 1179A00411CR1BV / Ar / 10 SCCM
Missing parts:
RF Generator with cover
Lift pins.
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