二手 AMAT / APPLIED MATERIALS EXTENSA Ti PVD Chamber for Endura II #9275276 待售
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ID: 9275276
晶圓大小: 12"
優質的: 2008
12"
Process: SIP TTN
Magnet
Matcher
Heater
Cryo pump OB-IF8
Gate valve: VAT
Angle vacuum valve: AVT-150M-P-03
Adaptor: 0040-98657
Manometer: 1350-00255
ATM gauge: W117V-3H-F12M-X30014
Capacitance pirani gauge: 3310-00073
Pedestal integration box: 0010-28071
Hot ion / Pirani gauge: 0190-26769
SAC CP 10 Block board: AS0084-03
Shutter sensor assembly: 0190-10801
Source assembly: 0010-31820
Angle vacuum valve: AVT-150M-P-03
Defective power supply: 0190-34624
Power supply: 24 V
Heater lift motor
Shutter motor: PK564AW2-A8
Wafer lift motor: MQMA012AF
Drivers:
Heater driver: 3096-1007
Wafer lift driver: 0190-15328
Pedestal driver: PV2A015SMT1PA0-C1
Magnet rotation driver: BXD400B-S
MFC:
AR 50
AR 200
Missing part:
Driver: 5 Phase
2008 vintage.
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