二手 AMAT / APPLIED MATERIALS Spare parts for P5000 Mark II / MxP / MxP+ #293618287 待售
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ID: 293618287
Part number / Description
0010-09969 / 0020-32075 / Outer housing, throttle valve, MxP
0010-09970 / Inner housing, throttle valve, MxP
0010-10581 / Throttle valve assy, AMAT MXP
0020-03658 / Clamp cylinder, 150 mm, oxide
0020-09103 / Butterfly plate, SUS316 , MxP T/V
0020-09156 / Bracket, ROT sensor
0020-10001 / Adaptor, MxP throttle, 41.75 x 41.75 x 12.7 T
0020-10278 / Bracket, rot harness
0020-21708 / Wafer chuck, orientor chamber, 200 mm
0020-30190 / Top adaptor, ME/PE
0020-31695 / Spacer wedge, throttle valve, MxP
0020-31700 / Shaft, SST, MxP T/V
0020-76066 / Robot arm coupler
0270-76054 / P5000 Robot storage stand
0190-02853 / Vat gate H-anod , perfluoro, 150 mm
0040-09069 / Cable assy, stainless wires
0020-31570 / Lifting pin, anod tip
0020-09144 / Sensor flag, ext, 150 mm wire robot
0020-10215 / Sensor flag, ext, 200 mm wire robot
0050-31101 / Gas inlet cover SSGD (MARK-II and MxP)
0020-32364 / Bracket, recessed endpoint
0050-30761 / Tube, gas supply, SGD
718-098591-001 / Seal plate, S-65 pendulum valve
718-098592-001 / Lock ring, S-65 pendulum valve
0020-30481 / Carrier, clamp cylinder, with flex coupling, STD
0020-32836 / Hinge, R-slit valve
0020-32837 / Hinge, L-slit valve
0010-70161 / Door assy, slit valve
0020-70434 / Slit door plate, H-anod
0020-70436 / Cam, slit plate, SUS304
0010-05574 / P5000 ZA Slit valve assy
0020-31490 / GDP, 37 Holes, T (0.078'), MXP
0020-70432 / Hinge, right, slit valve
0020-70433 / Hinge, left slit valve
0010-09088 / P5000 Robot alignment tool
0040-09012 / P5000 Robot arm, lower left
0040-09010 / P5000 Robot arm, lower right
5010-01017 / Thread locking bearing
0041-34851 / Shell ESC assy, MxP+Ox, 150 mm, flat
0020-34040 / Lift pin, A6061+anod, L (50 mm)
0021-09105 / Lift pin, A6061+anod, L (56 mm)
0020-32260 / GDP, 37 Holes, T (0.156'), MXP
0020-31493 / GDP, 133 Holes, T (0.078'), MXP
3690-03341 / Screw, P5000 MxP top cover, 1/4 x 1.5 L, hex SST
3690-02746 / Screw, P5000 Mark-II top cover, 1/4-20 x 1.25 L, hex SST
0020-30679 / Clamp cylinder, Poly 150 mm, STD cathode
0020-03597 / Carrier, clamp cylinder, H-anod, STD cathode
0020-09029 / Center ring, H-anod, STD cathode
0020-30347 / Ground ring, H-anod, Std cathode
0020-09069 / Lift pin, viton tip
0020-09860 / Front shoe, 150 mm
0020-70433 / Hinge, left, slit valve
0020-09039 / Strip, H-anod
0020-19896 / GDP, 96 Holes, H-anod, Mark-II
0020-31627 / Base Flange, for Tapered External Tube
0020-32259 / Gdp, 119 Holes, T (0.156"), MxP
0020-31463 / Carrier, clamp cylinder, with flex coupling, EXT
0020-30482 / Coupling, flex
0020-30198 / Tube external tapered, EXT cathode
0020-31147 / Insert base Al 150/200 mm flat
0020-31767 / Clamp cylinder, EXT-Poly, 200 mm
0020-30629 / Pedestal assy, 200 mm, Poly / WSI, Notch, with Nickle SHIM
0010-10327 / Shell Esc Assy, Mx P+ Ox, 200 Mm, Notch
0020-04038 / Plate, RF Match
0020-23594 / Plate, 8" CCD vacuum seal
0010-70089 / Slit valve assy
0010-70615 / Actuator slit valve assy
0020-31691 / Centering ring, gate valve
0240-33145 / ZA Slit valve assy
3020-01044 / Cylinder, I/O slit door, with magnet
EY-B06017 / Cylinder, I/O slit door
0040-09004 / Weld bellow, bearing assy
3870-03605 / Cylinder, HDP gate valve
0190-09016 / Electronic valve, 24 VDC, P5000
3870-01445 / Quick release valve, 1/8 NPT
0015-70041 / Cam follower, slit valve
3300-01984 / Swagelok male elbow
0040-20146 / Weld bellow, orienter chamber
3300-01956 / Quick connector, 3/8 female tube x 1/4 MNPT
3300-01986 / Quick connector, 3/8 male tube x 3/8 Swagelok
3870-01401 / High purity bellow sealed valve, n-open
0200-09636 / DC Plug, SIC with head
0200-09898 / Plug, EXT Poly ESC, graphite
0200-09657 / Window, recessed endpoint
0020-09005 / Window quartz, top view port
0200-09366 / DC Plug poly graphite 150 mm
0200-09757 / Clamp ring, ceramic, flat 150 mm, 0.95 ht finger
0200-10246 / GDP, UNI-Insert liner, 88 holes, quartz
0200-10243 / Shadow ring, 150 mm, flat, quartz
0200-10073 / Insulating pipe, MxP+
0200-10133 / Window, recessed endpoint, with step, MxP+
0200-00071 / Insulating pipe, quartz, 200 mm, EXT
0200-09222 / Ring, external quartz, 8"
0200-09217 / Ring, pedestal, quartz, 200 mm
0200-09741 / Focus ring, quartz, 200 mm
0200-02924 / DC Plug, graphite, 200 mm EXT
0200-10176 / Shadow ring, 200 mm, notch, quartz
0200-09782 / Pipe, insulating, quartz
0200-09785 / Cap, quartz
0200-09789 / Cover, quartz, 6" stepped, lift 2, flat
0200-09893 / Focus ring, 6" 162 mm , flat ESC
0100-00168 / Recipe select board
0100-00171 / Independent helium control board
0100-09080 / Robot cap-sensor interconnect board assy
0100-09086 / Stepper power driver board assy
0100-09139 / Robot extension / Sensor interconnect board assy
0140-09505 / Gate valve chamber harness ass
0150-09810 / Gate valve power extender cable
0150-09811 / Gate valve VME common GND cable
0150-09812 / Gate valve pneumatic cable ass
0150-76166 / Cable assy, remote analog
0150-76167 / Cable assy, remote digital
0150-76168 / Cable assy, remote DC power
0150-76169 / Cable assy, remote N2 flow interlock
0150-76192 / Cable assy, remote EMO
0090-09016 / Cable feedthru assy, cap sensor assy
0190-13175 / Light PEN SST 5 V 20 mA, with phone jack
0100-09042 / Opto sensor with PCB assy
0100-09086 / Stepper power drive board
3310-01012 / Thermocouple gauge, 1/8" NPT
3310-01074 / Thermocouple gauge, 1/4" VCR
EY-K16061 / Heating element, metal SGD lid, 900 W
0020-09053 / Sensor flag, STD cathode
0150-76132 / Cable assy, ESC controller, standard
0150-76132A / Cable assy, ESC controller, dual shield
0090-09006 / Open / Close Sensor assy, P5000 slit valve
0100-20078 / Laser driver board
1140-00023 / Power supply, p5000 VME
0150-09054 / Cable assy, RF match
0150-09054A / Cable assy, RF match, dual shield
0090-09151 / Cable assy, high voltage, simple cathode
0620-01245 / Cable assy, HV, simple cathode
0150-09800 / Cable assy, high voltage, STD cathode
0020-34046 / P5000 HV Conn high voltage, simple cathode
0910-01255 / Fuse, 1/2 A, 125 V MELF
0910-01256 / Fuse, 1 A, 125 V MELF
0910-01253 / Fuse, 2 A, 125 V MELF
0910-01277 / Fuse, 3 A, 125 V MELF
0910-01254 / Fuse, 5 A, 125 V MELF
0910-01287 / Fuse, 7 A, 125 V MELF
0140-09173 / Cable assy, EXT sensor
0140-09174 / Cable assy, ROT sensor
0140-09175 / Cable assy, ROT motor
0090-09007 / Cable feedthru assy, center finder
0190-09372 / Assy, TC, HTR, WxZ
3310-01071 / TC Gauge, 1-1000 mtorr metal tube 1/8" IPS
1400-30700 / Magnet sensor assy, lift cylinder
1010-01073 / Lamp, 120 V, 1000 W
0010-10185 / Driver assy, throttle valve
0010-76019 / Cassette handler assy, 200 mm
0090-02952 / Motor encoder assy, robot rotation (P/N: 0090-75009)
0090-02953 / Motor encoder assy, robot extension (P/N: 0090-75010)
0150-70018 / Cable assy encoder flat flex 34 position
0150-70017 / Cable assy, encoder, flat flex, 6 position
0150-75068 / Cable assy, motor encoder
853-017637-001 / Step motor assy, ext, plastic connector, LAM RESEARCH Harmonic arm
853-017637-002 / Step motor assy, rot, plastic connector, LAM RESEARCH Harmonic arm
3080-01048 / Timming belt, 0.080 P x 70 T, throttle valve
0090-02982 / Motor brake encoder assy, elevator (P/N: 0090-75008)
3080-01031 / Timming belt, 3 mm x 75 T, Storage Elevator
3080-01029 / Timming belt, 3 mm x 84 T, robot EXT
3080-01030 / Timming belt, 3 mm x 95 T, robot ROT
0020-04079 / Feedthru Helium
3700-01221 / Seal, linear radial 50'²
0020-76065 / Spur gear
0020-06047 / POM Bearing, throttle valve
0020-06048 / Bushing Teflon, throttle valve
0020-32365 / Filter, UV, recessed endpoint
3860-01125 / Plastic tube, 1/4 OD x 1/32 wall, L 70 cm
0020-04181 / Insulating flange, bottom ARDEL
0020-09031 / Insulating washer, PSU
0020-03656 / Vespel screw
0020-32141 / Feedthru Helium, 2 pass, P5000 ESC
0020-32142 / Plug, feedthru, VESPEL
0020-04160 / Spacer circular ring, EXT cathode
0020-30628 / Clamp ring, 200 mm EXT cathode, VESPEL
3700-01484 / Seal DYN EXT radial, 1.241 OD x .998 ID x .235 W
3700-01485 / Seal DYN ROT radial, 2.243 OD x 2.0 ID x .235 W
0020-04277 / Insulating flange, taper, EXT cathode
0020-03426 / Plug, VESPEL, 200 mm pedestal screw hole
3700-01357 / Rod seal, lip, CVD throttle valve
0010-09340 / Susceptor lift assy
0010-09341 / Wafer lift assy
0010-10039 / Gate valve assy, HTD
0010-30334 / Inner housing assy, throttle valve, MxP
0010-70191 / P5000 Slit valve actuator assy.
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