二手 FSI / TEL / TOKYO ELECTRON Spare parts for Polaris 2500 #9355801 待售
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ID: 9355801
Qty / Part number / Description
(1) / 233017-002 / ZSE2-TI-55 Sensor VAC Polaris
(1) / 294123-401 / AMP Stepping motor
(2) / 294124-401 / DS043-001741-1 Heater interface bake / Chiller
(2) / 294136-401 / BWS2412 PCB EEP Lower module Polaris kirkes
(1) / 294182-401 / CCA Motor amp
(2) / 294235-401 / Optical sensor theta pub
(2) / 429869-001 / PCB Motor amp theta axis
(3) / 906470-003 / Screw lead HMDS / Bake / Chill plate
(1) / 916368-001 / Vx2132m Valve SMC pneumatics
(1) / 919804-001 / Sensor DWR closed hughes.
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