二手 LPE Spare parts for 2061 #9389180 待售

(3) EPI Kits: Part number / Make / Description CP53-1 / QUARTZ / ATM, Bell jar CP53-2 / QUARTZ / Cup CP53-3 / QUARTZ / Drain tube CP53-4 / QUARTZ / Base plate half with hole CP53-5 / QUARTZ / Base plate half without hole CP53-6 / QUARTZ / Top disk CP53-7 / QUARTZ / Spacer CP53-8 / QUARTZ / Umbrella CP53-9 / - / Turn table cap CP53-10 / - / Umbrella spacer Extra parts: Qty / Part number / Make / Description (2) / TS0887WQ / - / Rev 1 SIC Long susceptors (2) / TS679WQ-0 L SGL 9J157 / - / - (4) / TS0677WQ / WFR-SIC / - / Barrels (2) / TS0679WQ / WFR-SIC-T / SGL CARBON / Plates (15) / TS0676WQ / SIC / SGL CARBON / Lower baffle plates (15) TS0675WQ / SIC / SGL CARBON / Upper baffles (4) / WQ5342 / SIC / SGL CARBON / Supports (2) / - / - / Susceptors Used parts: Qty / Part number / Description (1) / WQ5342 / SGL Carbon SIC Support (3) / TS0679 WQ / -.