二手 NOVELLUS Chambers for Concept 2 Speed #9409213 待售
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ID: 9409213
晶圓大小: 8"
優質的: 2000
8"
Chamber A and B:
IOC Version: 4.1
PFEIFFER TMH 1600PC Turbo vacuum pump
Match network: TRAZAR AMU
Pedestal lift type: Concentric cylinder
Input location (Gas, PCW, CDA): Bottom
Throttle type: MKS 153D
Dome type: Top cool dome
Manometer:
MKS 100 mm Torr
Typan 10 Torr
Gas / MFC / MFC Size / MFC Area
SiH4 / MFC4 / 200 SCCM / FC7800CD
He / MFC5 / 1 SLM / -
H2 / MFC8 / 2 SLM / FC7800CD
O2 / MFC2 / 500 SCCM / FC7800CD
Ar / MFC1 / 500 SCCM / FC7800CD
NF3 / MFC3 / 1 SLM / FC7800CD
NF3 / MFC7 / 300 SCCM / -
2000 vintage.
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