二手 SVG Spare parts for 90 #9400906 待售
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ID: 9400906
Qty / Part number / Description
(4) / 99-43936-01 / Indexer assemblies (IES)
(1) / 99-45958-01 / Coater module controller, hi spin motor
(2) / 99-45959-01 / Developer module controllers, low spin motor
(1) / 99-44636-01 / Assembly ,Power supply module 32A SST
(1) / 99-42710-01 / Indexer shutter assembly
(1) / 85-22664-02 / Keyboard assy main screen monitor
(1) / 99-38145-01 / Main shutter assembly
(5) / 99-42392-01 / PVB Enclosed temperature controllers, poly-bake
(1) / 99-38534-01 / HMPS Module assy, enclosure temperature control
(1) / 99-66564-01 / Exhaust flow controller (water)
(2) / 99-45452-01 / Developer exhaust flow controllers
(2) / 112-59411-01 / Developer spindle motor, spin station low ACC
(1) / 112-59410-01 / Coater spindle motor, hi ACC
(3) / 99-39982-01 / Coater centering plate assembly
(1) / 99-39628-01 / Coater top EBR assembly
(1) / 112-144 / Coater motor, spindle,90s air assist
(2) / 112-100 / Developer motor, 19:5:1:24 VDC
(2) / 112-087 / Main shutter assy, drive motor random shutter
(4) / - / GPI Unit OMRON E5 AX Digital controller
(1) / - / Sysmac C28H PLC OMRON chemical cabinet
(1) / - / Sysmac C200H OMRON PLC chemical cabinet
(4) / - / GPI Unit OMRON E5 AX Digital controller
(4) / - / Wafergard chemical dispense system WCDS pump
(1) / 99-46520-01 / SVG 90 CPU Controller at, supervisor drive
(6) / 99-42283-01 / Assembly, heater housing poly-bake
(2) / 99-38369-01 / Chill plate assembly
(4) / 99-38150-01 / Serial arm assy, arm 5" random
(1) / - / MYKROLIS Photo 250 Pump
(1) / 99-20076-01 / Coater module assy, catch cup
(2) / 99-80207-02 / Coater PCB Assy, spin STA expansion
(1) / 99-80166-01 / Vapor prime module PCB, station controller
(2) / 99-80166-01 / Developer module PCB, station controller
(2) / 99-80166-01 / Cool plate PCB, station controller
(4) / 99-80166-01 / Poly-bake module PCB, station controller
(2) / 99-80166-01 / PCB Assy, station controller
(4) / 99-80166-01 / Indexer module PCB, station controller
(1) / 99-80266-01 / Assy PCB, station controller coater module
(1) / 99-80270-01 / PCB Sensor multiplexer
(1) / 114-059 / Developer module PCB, solenoid valve control
(1) / - / Fluid temperature controller FTC.
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