二手 TEL / TOKYO ELECTRON Lot of spare parts for TE 580LC #9274928 待售
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ID: 9274928
Qty / Part number / Description
(2) / 9031103-0 / Outer gate assy
(50) / PT-550 / Photo sensor light receptions
(4) / 054-103352-1 / Potentiometers
(6) / MMTD2585G-12 / 4G-100 / GAP drive gear motors
(5) / 2233F012S / DC Geared motors
(10) / 4G-100 / GAP Motor gearheads for TE48 / 580
(1) / 8DG75 / Gear head
(1) / TD2444G-12H 8DG50 12V / GAP motor
(1) / 1M87-000440-11 / Sensor assy gap for TE580
(2) / Z26460 9P30026-1 / Upper electrode gas plates (Aluminum) screw
(1) / M10-402859-6 / Bolt cap
(3) / M10-402205-4 / Clamp ring insulating bushs
(8) / SP-1 / Set screw for shield rings for TEL580
(4) / - / Front rear windows
(2) / 1072000-001 / Shield rings
(3) / M10-402207-1 / Clamp rings Mekura
(4) / - / Exhaust rings-C
(2) / - / Exhaust rings-L
(1) / - / Exhaust ring -R
(1) / 1880-026696-12 / Upper electrode (Amorphous electrode)
(1) / - / Lower electrode
(1) / - / Flange
(3) / - / Upper electrodes
(42) / AS568A-217 / O-rings
(24) / AS568A-249 / O-rings
(32) / AS568A-218 / O-rings
(26) / SFR-188 / Bearings
(1) / CPJ20-BL-8-8 / GAP motor coupling
(5) / M10-402843-1 / Wafer rotation shafts
(2) / C-2-50-40-R2 / Air cylinders.
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