二手 VARIOUS Lot of spare parts #9243328 待售
網址複製成功!
ID: 9243328
Part number / Description
Process kit A:
0200-09603 / Pipe, insulating, quartz, esc
0020-30347 / Cylinder, external
0020-31488 / Gas distribution plate, 13 holes
0020-31628 / Washer, insulating, esc
0020-31632 / Carrier, esc
0020-31642 / Cover, bolt, esc
0200-09606 / Cover, quartz, 200 mm, high profile, notch
0200-09865 / Plug bias silicon carbide esc
0200-10133 / M window, recessed endpoint
3700-01687 / O-ring id 5.609 csd .139 chemraz sc520 90
3700-01838 / O-ring id 2.359 csd .139 chemraz sc520 90d
Process kit B:
0020-31488 / Gas distribution plate, 13 holes
0020-31628 / Washer, insulating, esc
0020-34748 / Cylinder, external, lowered cathode
0020-34749 / Carrier, esc, lowered cathode
0020-34752 / Lift pin, conductive, xtd, 1.5 mm
0200-09005 / Window, quartz
0200-10180 / Quartz pipe, lowered cathode
0200-10181 / Collar, quartz
0200-10182 / Focus ring, lowered cathode, notched esc
0200-10183 / Bias plug, quartz, lowered cathode
3700-01687 / O-ring id 5.609 csd .139 chemraz sc520 90
3700-01838 / O-ring id 2.359 csd .139 chemraz sc520 90d
Process kit C:
0020-30347 / Cylinder, external
0020-31492 / Gas distribution plate 101 holes
0020-31628 / Washer, insulating, esc
0020-31632 / Carrier, esc
0021-10019 / Cover, bolt, thin ped, esc
0030-09085 / Barrier seal, s20, 200 mm, notch
0200-09916 / Bias plug, quartz
0200-10133 / M window, recessed endpoint
0200-10416 / Mp collar, 200 mm, notch, low profile, barrier
0200-10417 / Collar, outer, 200 mm, notch, barrier, qu
0200-10418 / Pipe, quartz insulating, thin pedestal
3700-01687 / O-ring id 5.609 csd .139 chemraz sc520 90
Process kit E:
0020-30347 / Cylinder, external
0020-31628 / Washer, insulating, esc
0020-31632 / Carrier, esc
0020-34015 / Gas distribution plate 101 holes on 8.5"
0030-09085 / Barrier seal, s20, 200 mm, notch
0200-09005 / Window, quartz
0200-09916 / Bias plug, quartz
0200-10416 / Mp collar, 200 mm, notch, low profile, barrier
0200-10417 / Collar, outer, 200 mm, notch, barrier, qu
0200-10418 / Pipe, quartz insulating, thin pedestal
3700-01687 / O-ring id 5.609 csd .139 chemraz sc520 90
3700-01838 / O-ring id 2.359 csd .139 chemraz sc520 90d
Process kit F:
3700-01425 / O-ring id 14.984 csd 139 kalrez 407975d
3700-01687 / O-ring id 5.609 csd 139 cz sc520 90
0010-03175 / R susceptor assy teos, 200 mm
0020-10185 / Support hoop, 200 mm
0190-09263 / Pumping plate plenum, 200 mm peteos
0020-10192 / Ring wafer lift, 200 mm
0020-09072 / Shield, 200 mm
0020-32036 / Plate blocker 100sx universal chamber mes
0020-10117 / Plate perf oxide, 200 mm
0200-09074 / Window heater, 200 mm
Process kit G:
0010-09464 / Susceptor assy nitride, 200 mm
0020-10123 / Plate perf ni, 200 mm
0020-10185 / Support hoop, 200 mm
0020-10192 / Ring wafer lift, 200 mm
0020-10402 / Pumping plate, 200 mm
0020-10936 / Blocker plate silane, 200 mm
0190-09118 / Hybrid seal, quartz window
0020-09072 / Shield, 200 mm
0200-09074 / Window htr, 200 mm
0200-09075 / Adaptor plate pumping, 200 mm
3700-01687 / O-ring id 5.609 csd .139 chemraz sc520 90
Process kit J:
0020-30347 / Cylinder, external
0020-31492 / Gas distribution plate 101 holes
0020-31628 / Washer, insulating, esc
0020-31632 / Carrier, esc
0030-09085 / Barrier seal, s20, 200 mm, notch
0200-09005 / Window, quartz
0200-09916 / Bias plug, quartz
0200-10416 / Mh collar, 200 mm, notch, low profile, barrier
0200-10417 / Collar, outer, 200 mm, notch, barrier, quartz
0200-10418 / Pipe, quartz insulating, thin pedestal
3700-01687 / O-ring id 5.609 csd 139 chemraz sc520 90
3700-01838 / O-ring id 2.359 csd 139 chemraz sc520 90d
Process kit K:
0020-31492 / Gas distribution plate 101 holes
0020-34748 / Cylinder, external, lowered cathode
0020-34749 / Carrier, esc, lowered cathode
0020-34752 / Lift pin, conductive, xtd 1.5 mm
0200-09005 / Window, quartz
0200-10180 / Quartz pipe, lowered cathode
0200-10181 / Collar, quartz
0200-10182 / Focus ring, lowered cathode, notched esc
0200-10183 / Bias plug, quartz, lowered cathode
3700-01687 / O-ring id 5.609 csd 139 chemraz sc520 90
3700-01838 / O-ring id 2.359 csd 139 chemraz sc520 90d
Process kit L:
0020-30347 / Cylinder, external
0020-31492 / Gas distribution plate 101 holes
0020-31628 / Washer, insulating, esc
0020-31632 / Carrier, esc
0200-09603 / Pipe, insulating, quartz, esc
0200-09606 / Cover, quartz, 200 mm, high profile, notch
0200-09865 / Plug bias silicon carbide esc
0200-10133 / M window, recessed endpoint
3700-01687 / O-ring id 5.609 csd 139 chemraz sc520 90
3700-01838 / O-ring id 2.359 csd 139 chemraz sc520 90d
Process kit M:
0020-30347 / Cylinder, external
0020-31492 / Gas distribution plate 101 holes
0020-31628 / Washer, insulating, esc
0020-31632 / Carrier, esc
0200-09603 / Pipe, insulating, quartz, esc
0020-32237 / Cover vespez, 200 mm high profile notch es
0200-09865 / Plug bias silicon carbide esc
0200-10133 / M window, recessed endpoint
3700-01687 / O-ring id 5.609 csd 139 chemraz sc520 90
3700-01838 / O-ring id 2.359 csd 139 chemraz sc520 90d
Process kit N:
0020-32312 / Door, slit valve s
0020-34694 / Liner, gdp, r2 oxide geco
0021-09097 / Plate, liner alignment, vespel
0021-09718 / Liner, slit valve
0200-09005 / Window, quartz
0200-10073 / Insulator, quartz, 200 mm, simple cathode
0200-10176 / Shadow ring, quartz, 200 mm notch
0200-10246 / Uni-insert, gdp, liner, 88 hold, quartz
3700-01687 / O-ring id 5.609 csd .139 chemraz sc520 90
3700-01838 / O-ring id 2.359 csd .139 chemraz sc520 90d
Process kit O:
0020-04076 / Plate, gas distribution (small holes & cha)
0010-09474 / Pedestal assy, 8" Ext cathode, ni/wf/poly
0020-04164 / Carrier, 200 mm (ext cathode)
0020-04167 / Lift cylinder, 8, ext
0020-04172 / Insert, base ext cathode
0020-04306 / Insert, 200 mm ext cathode
0020-30198 / Tube, external, tapered, ext cathode
0020-30362 / Ring quartz, 8" Ext cathode
0020-31621 / M ring clamping vespel, 200 mm notch
0200-00057 / Window small std window
3700-01838 / O-ring id 2.359 csd 139 chemraz sc520 90d
0200-00058 / Gas ring small holes & channels
0200-00070 / Ring, quartz, 8, ext, dc
0200-00071 / Insulating pipe, quartz, 200 mm, ext
0200-09005 / Window, quartz
0200-09222 / Ring external quartz, 8"
0200-09244 / M cover quartz, 8" ext cathode wafer modified
3700-01687 / O-ring id 5.609 csd .139 chemraz sc520 90
Process kit P:
0040-20284 / D37 bell jar quartz
0020-22852 / D09 shield
0200-20426 / D38 insulator
Process kit Q:
0200-09572 / Collar, si, ox/mlr/nit, 200 mm, notch
0200-09179 / Insulating pipe quartz
0200-10133 / M window, recessed endpoint
3700-01687 / O-ring id 5.609 csd .139 chemraz sc520 90
3700-01838 / O-ring id 2.359 csd .139 chemraz sc520 90d
0040-09256 / Pedestal, notch oxide etcher, 8"
0020-09029 / Covering pipe
0020-09031 / Insulating washer
0020-09069 / Lifting pin, viton tip
0020-30347 / Cylinder, external
0020-30481 / Carrier, 8"W/flex
0020-30482 / Coupling, flex, 8", oxide
0020-30854 / Plate gas dist ox/mlr/nit
0020-30855 / Plug gas dist plate ox/mlr/nit
0020-31658 / M clamp vespel ox/mlr/nit, 200 mm
Process kit S:
0020-30347 / Cylinder external cover
0020-31628 / Washer insulating
0020-31632 / Carrier esc
0200-09603 / Pipe, insulating, quartz, esc
0200-09606 / Cover, quartz, 200 mm, high profile, notch
0200-10416 / Mh collar, 200 mm, notch, low profile, barrier
0200-10417 / Collar, outer, 200 mm, notch, barrier, qu
0200-10418 / Pipe, quartz insulating, thin pedestal
0020-10117 / Shower head teso plate perf oxide, 200 mm
0020-10185 / Support hoop wafer, 200 mm
0020-10192 / Ring wafer lift ,200 mm
0020-32036 / Plate blocker 100sx universal chamber mes
0190-09263 / Pumping plate plenum, 200 mm
0200-09072 / Ring ceramic shield
0020-10123 / Plate perf ni, 200 mm
0020-10185 / Support hoop, 200 mm
0020-10192 / Ring wafer lift, 200 mm
0020-10402 / Pumping plate, 200 mm
0020-10936 / Blocker plate silane, 200 mm
0020-09072 / Shield, 200 mm
0200-09075 / Adapter plate pumping, 200 mm
Process kit T:
0020-30347 / Cylinder external cover
0020-31628 / Washer insulating
0020-32237 / Cover vespel
0200-09603 / Pipe, insulating, quartz, esc
0200-09606 / Cover, quartz, 200 mm, high profile, notch
0020-31632 / Carrier esc
0200-10416 / Mh collar, 200 mm, notch, low profile, barrier
0200-10417 / Collar, outer, 200 mm, notch, barrier, qu
0200-10418 / Pipe, quartz insulating, thin pedestal
0020-09031 / Insulating washer
0020-09911 / Carrier, sputter
0020-10518 / Pedestal thick, 200 mm graphite / Quartz
0020-10527 / Sputter pipe
0020-30347 / Cylinder, external
0020-30854 / Plate gas dist ox/mlr/nit
0020-30855 / Plugs gas dist plate
0200-09086 / Quartz ring, 200 mm sputter etch
0200-09090 / Ring graphite, 200 mm sputter etch
0200-09608 / Shield quartz, 200 mm, sputter etch
0020-10117 / Shower head teso plate perf oxide, 200 mm
0020-10185 / Support hoop wafer, 200 mm
0020-10192 / Ring wafer lift, 200 mm
0020-32036 / Plate blocker 100sx universal chamber mes
0190-09263 / Pumping plate plenum, 200 mm
0020-09072 / Shield, 200 mm.
還沒有評論