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ID: 293752285
Inductively Coupled Plasma Mass Spectrometer (ICP-MS)
Model no: G3153A
Transfer chamber options: Chamber body
Heat exchanger/chiller: PM1, PM2, PM3
PM1:
Chamber A - DPN
Wafer cooling
Ground VDE
No RGA port
PM2:
Chamber B - ISSG
No Toxic Chamber
Reduce pressure capability
Exhaust options:
No RGA port and valve
No ISPM Prep
No Oxygen analyzer
Loadlock/Cassette:
Chamber options:
Chamber body
Number of chamber
Type
Cassette stage
Wafer mapping
Mainframe options:
Status light tower: Lamp colors
Pump options
Pump provider
Pump interface type
Cooler pump
Transport chamber pump
Loadlock chamber pump
Process chamber pump: PC1, PC2, PC3
Missing parts:
Peristaltic pump
Peristaltic tubing
Line voltage: 200-240V, 24A
Line frequency: 50/60 Hz.
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