二手 FHR Line 1100 V7 #9257514 待售
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ID: 9257514
Inline sputtering system
Deposition of dielectric coatings: 7° front side
Modules:
Module 1: Loading station
Module 2: Input load lock
Module 3: Buffer chamber 1
Module 4: Buffer chamber 2
Module 5: Sputtering pseudo reactive
Module 6: Gas separation buffer chamber
Module 7: Sputtering reactive
Module 8: Output load lock
Module 9: Unloading station
Substrate load / Unload module using (2) KUKA robots
Vacuum:
End pressure: ≤2 x 10^-6 mbar after 8 hours
End pressure: ≤1.5 x 10^-6 mbar after 12 hours
Chambers:
Stainless steel vacuum chamber
Powder coated mild steel chamber frame
Pneumatic gate valves
Modules includes:
Turbo molecular pump: DN 250 ISO-K
View port: DN 100
Front service flange
Flap valves VAT
Rotary dry pump: 300 m³/h and 250 m³/h
Roots pump: 1000 m³/h
1900 Is^-1 for N2 and ca 1400 I/s for N2
Gate valves DN 250
Meissner trap with cryo generator
(6) Pirani gauge fore vacuum sensors: 1000 mbar-10^-3 mbar
(8) Penning high vacuum sensors: 10^-3 mbar-10^-8 mbar
(13) Baratrons MKS 627: 10^-1 mbar-10^-4 mbar
Upstream pressure regulation
Atmospheric pressure sensors
Heater
vacuum gauges
Reserve flanges
Rotatable sputtering cathodes:
(8) TiOx cathodes
SCI MC End block
Target length: 43"
Backing tube diameter: 5"
Target substrate distance: 4"
Gas admission system:
MFC for Ar each sputtering source
Gas lines for 5N purity
(4) MF Bipolar power supplies
Control and visualization:
PC Surface
Operating system: Windows 7 Professional
PLC General control
Cooling water:
Power supplies
Cathode
Cathode surrounds cooled by water loops
Power supplies:
Aggregate connection: 3 / N / PE AC 380 V / 50 Hz
24 V.
FHR 1100 V7線是由FHR設計制造的濺射設備。它是一種物理氣相沈積(PVD)系統,能夠通過稱為濺射的過程將金屬、介電和/或陶瓷材料薄膜沈積到基板上。Line 1100 V7專為工業應用而設計,並配有多種特性以支援大批量生產。FHR Line 1100 V7由發電機提供動力,在手動或自動模式下,發電機可產生從1KW到8KW的功率輸出。其真空單元由兩個階段組成;用於疏散目標腔室的粗加工泵和用於維持高真空條件的渦輪泵。本機在沈積室中可達到10-7托的壓力,底壓為10-11托。1100 V7線可配置一至四個磁控管,可同時獨立運行。每個磁控管都裝有一個陶瓷或鋼制的目標,用於沈積材料。該工具也可用於反應性濺射以沈積氧化物或氮化物材料,以及在透明導電氧化物(TCO)塗層的情況下的氧化鐵錫(ITO)。FHR Line 1100 V7具有超精確的掃描資產,可編程為覆蓋不同大小和形狀的基板。可用於沈積可定制厚度的材料,最大層厚度為25微米。再者,它配備了多種基板的支撐。它有專用的基板支架來支撐薄至0.1毫米、尺寸可達300毫米見方的基板。該模型還能夠獨立控制基板溫度,以幫助調整光學清晰度或應力等特性。1100 V7號線為了操作員的安全和易用性而設計。它采用模塊化設計,便於安裝和維修。為了進行維修,FHR 1100 V7號線配備了一個自動清除設備,可以快速撤離剩余材料和汙染物的艙室。此外,還可以配置遠程監視和控制選項,以實現遠距離操作。最後,該系統能夠生成詳細的分析,允許精確的過程優化和跟蹤。
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