二手 GS / LEYBOLD UNIVEX 350 G #293725240 待售

Sputtering deposition system Sputter chamber (RF and DC) Spin coater Sluice (5) GS GLOVEBOX SYSTEMTECHNIK Glovebox Sputter deposition (RF and DC) MARIS DC Generator sputter ADVANCED ENERGY / DRESSLER CESAR 136 E/600W RF Generator sputter LEYBOLD TurboVac MAG Integra Turbopump sputter LEYBOLD ScrollVac SC30 D Pump Sputter  ADVANCED ENERGY / DRESSLER VM1000/1500 Platform Matchbox AE Vario match network HEWLETT PACKARD Laptop sputter P Pro Book Control cabinet: Switch cabinet: 1x 19" Operator panel Windows compatible Pump system Vapor deposition process Orifice Media and connections: Cooling water Compressed air supply Ventilation gas Vacuum chamber: Stainless steel chamber Stainless steel: Plates, Removable, chamber walls, Ceiling doors High-vacuum pump Pressure measuring range: 1000 to 5E-10 mbar Chamber ventilation Pressure safety switch Overpressure safety Turbomolecular pump DN 200 ISO-K Electropneumatic value Levitated turbomolecular pump Pumping speed: 1100 l/s Blocking: Gas, Venting Scroll vacuum pump Nominal pumping capacity: 30 m³/h RF/DC Sputtering: Clamping targets: 4" (Indirectly water-cooled) Bond targets: 4" (Directly water-cooled) Tiltable sputtering head Electro-pneumatic Orifice Chimney Direct gas DN 160 ISO-K Flange (2) Water flow monitor Process gas inlet Gas flow regulator Substrate rotation: Rotary drive Motor Control unit Single substrate: 150mm x 150mm Bayonet fitting Power supply: 400V, 3 Phase, 50Hz, +5%/ -10%, N / PE, 16A.